Reliability of MEMS: A perspective on failure mechanisms, improvement solutions and best practices at development level
J Iannacci - Displays, 2015 - Elsevier
Abstract Reliability of MEMS (MicroElectroMechanical-Systems) devices is a crucial aspect
as it can discriminate the successful from partially or totally missed reaching of Microsystem …
as it can discriminate the successful from partially or totally missed reaching of Microsystem …
Compensation of the Stress Gradient in Physical Vapor Deposited Al1−xScxN Films for Microelectromechanical Systems with Low Out-of-Plane Bending
Thin film through-thickness stress gradients produce out-of-plane bending in released
microelectromechanical systems (MEMS) structures. We study the stress and stress gradient …
microelectromechanical systems (MEMS) structures. We study the stress and stress gradient …
Enhanced robustness of a bridge-type Rf-mems switch for enabling applications in 5G and 6G communications
J Casals-Terré, L Pradell, JC Heredia, F Giacomozzi… - Sensors, 2022 - mdpi.com
In this paper, new suspended-membrane double-ohmic-contact RF-MEMS switch
configurations are proposed. Double-diagonal (DDG) beam suspensions, with either two or …
configurations are proposed. Double-diagonal (DDG) beam suspensions, with either two or …
Modelling, Validation and Experimental Analysis of Diverse RF-MEMS Ohmic Switch Designs in View of Beyond-5G, 6G and Future Networks—Part 1
J Iannacci - Sensors, 2023 - mdpi.com
The emerging paradigms of Beyond-5G (B5G), 6G and Future Networks (FN), will capsize
the current design strategies, leveraging new technologies and unprecedented solutions …
the current design strategies, leveraging new technologies and unprecedented solutions …
Low insertion loss and high isolation capacitive RF MEMS switch with low pull-in voltage
Y Mafinejad, A Kouzani, K Mafinezhad… - … International Journal of …, 2017 - Springer
Micro electromechanical system (MEMS) shunt capacitive switches behave chiefly as a
capacitor at both up and down states. Therefore, input-output matching for these switches is …
capacitor at both up and down states. Therefore, input-output matching for these switches is …
[PDF][PDF] A flexible fabrication process for RF MEMS devices
RF MEMS are assuming a great importance in the fast evolving telecommunication market
and space applications. In the last years a flexible technology platform has been developed …
and space applications. In the last years a flexible technology platform has been developed …
On the electrostatic actuation of capacitive RF MEMS switches on GaAs substrate
The electrostatic actuation behaviour of the gold bridge in capacitive radio frequency
microelectromechanical system switches, fabricated on GaAs substrate, is investigated. An …
microelectromechanical system switches, fabricated on GaAs substrate, is investigated. An …
Optimization of thick photoresist for uniform thickness in RF MEMS applications
Abstract Micro-electromechanical systems (MEMS)-based devices comprise suspended
structures. A sacrificial layer is required to realize these structures. Usually, metal and …
structures. A sacrificial layer is required to realize these structures. Usually, metal and …
Modeling and experimental verification of thermally induced residual stress in RF-MEMS
A Somà, MM Saleem - Journal of Micromechanics and …, 2015 - iopscience.iop.org
Electrostatically actuated radio frequency microelectromechanical systems (RF-MEMS)
generally consist of microcantilevers and clamped–clamped microbeams. The presence of …
generally consist of microcantilevers and clamped–clamped microbeams. The presence of …
Influence of design and fabrication on RF performance of capacitive RF MEMS switches
Shunt capacitive radio-frequency microelectromechanical system (RF MEMS) switches were
fabricated on silicon substrate and characterized in the RF domain. Various switch …
fabricated on silicon substrate and characterized in the RF domain. Various switch …