Black poly-silicon: A nanostructured seed layer for sensor applications

Z Fekete, AC Horvath, Z Bérces, A Pongrácz - Sensors and Actuators A …, 2014 - Elsevier
Nanostructured silicon surfaces like black-silicon (b-Si) are of great interest in current sensor
technology. This paper presents an alternative method to fabricate b-Si in poly-silicon thin …

Single-step fabrication of homoepitaxial silicon nanocones by molecular beam epitaxy

A Colniţă, D Marconi, RT Brătfălean, I Turcu - Applied Surface Science, 2018 - Elsevier
The purpose of this work was to optimize a single-step fabrication process of silicon (Si)
cones-like nanostructures on Si (111) reconstructed substrates. The substrate temperature is …

Fabrication of patternable nanopillars for microfluidic SERS devices based on gap-induced uneven etching

Y Wang, LC Tang, HY Mao, C Lei, W Ou… - 2015 28th IEEE …, 2015 - ieeexplore.ieee.org
In this work, a lithography-free approach for fabricating patternable nanopillars is reported.
The key technique of the approach is to introduce a gap over the substrate by covering it …

Nanopillar-forest based surface-enhanced Raman scattering substrates

AD Bao, HY Mao, JJ Xiong, ZJ Chen, W Ou… - Science China …, 2014 - Springer
In this work, nanopillar-forest based surface-enhanced Raman scattering substrates were
fabricated using a novel approach. The key technique of the approach is taking advantage …