Physical, chemical, and in vitro toxicological characterization of nanoparticles in chemical mechanical planarization suspensions used in the semiconductor industry …
D Speed, P Westerhoff, R Sierra-Alvarez… - Environmental …, 2015 - pubs.rsc.org
This tutorial review focuses on aqueous slurries of dispersed engineered nanoparticles
(ENPs) used in chemical mechanical planarization (CMP) for polishing wafers during …
(ENPs) used in chemical mechanical planarization (CMP) for polishing wafers during …
Functionalized boron nitride ceramic nanofiltration membranes for semiconductor wastewater treatment
Boron nitride (BN) nanomaterials were used to enhance the separation performance of
membranes due to their ability to create more nanochannels with excellent chemical …
membranes due to their ability to create more nanochannels with excellent chemical …
Role of co-existing ions in the removal of dissolved silica by ceramic nanofiltration membrane
Even low concentrations of nano-sized silica particles should be effectively removed from
chemical mechanical polishing (CMP) wastewater as they can corrode the pipes in …
chemical mechanical polishing (CMP) wastewater as they can corrode the pipes in …
Clean enhancing elimination of boron from silicon kerf using Na2O-SiO2 slag treatment
Silicon kerf waste can be used as a secondary resource for the recovery of high purity silicon
for solar cells production. Boron is amongst the most deleterious impurities in silicon and its …
for solar cells production. Boron is amongst the most deleterious impurities in silicon and its …
An overview of solid/liquid separation methods and size fractionation techniques for engineered nanomaterials in aquatic environment
N Wu, Y Wyart, Y Liu, J Rose… - Environmental Technology …, 2013 - Taylor & Francis
The increasing use of engineered nanomaterials (ENMs) will inevitably result in their
release into natural environment and thereby lead to the exposure of living organisms …
release into natural environment and thereby lead to the exposure of living organisms …
Dead-end and crossflow ultrafiltration process modelling: Application on chemical mechanical polishing wastewaters
K Ohanessian, M Monnot, P Moulin, JH Ferrasse… - … Research and Design, 2020 - Elsevier
Dynamic simulation of ultrafiltration process is applied to the treatment of chemical
mechanical polishing wastewater from microelectronic industry. The ultrafiltration of …
mechanical polishing wastewater from microelectronic industry. The ultrafiltration of …
[HTML][HTML] Revisiting the water-use efficiency performance for microelectronics manufacturing facilities: Using Taiwan's Science Parks as a case study
Semiconductors are enabling technologies that drive today's information economy by
producing a broad spectrum of microelectronic consumer products including computers, flat …
producing a broad spectrum of microelectronic consumer products including computers, flat …
Performance of integrated membrane filtration and electrodialysis processes for copper recovery from wafer polishing wastewater
This study assesses the efficiency of a combining ultrafiltration (UF) and electrodialysis (ED)
processes to treat and reclaim wastewater, a discharge of the copper chemical mechanical …
processes to treat and reclaim wastewater, a discharge of the copper chemical mechanical …
A metallurgical route to upgrade silicon kerf derived from diamond-wire slicing process
Silicon kerf generated during the diamond-wire slicing process contains various impurities
and are considered industrial waste. In order to utilize the waste, a feasible process to purify …
and are considered industrial waste. In order to utilize the waste, a feasible process to purify …
Environmental aspects of planarization processes
DE Speed - Advances in chemical mechanical planarization (CMP), 2022 - Elsevier
This chapter describes the occurrence, behavior, and treatment of wastewater that is
produced by the Chemical Mechanical Planarization (CMP) process when it is used to …
produced by the Chemical Mechanical Planarization (CMP) process when it is used to …