Design analysis of polysilicon piezoresistors PDMS (Polydimethylsiloxane) microcantilever based MEMS Force sensor
This study is aimed for the analysis of different designs for sensing low magnitude forces
which lies in the micro-Newton range and suitable for biomimetic microbotics. For this, a …
which lies in the micro-Newton range and suitable for biomimetic microbotics. For this, a …
Influence of the pressure range on temperature coefficient of resistivity (TCR) for polysilicon piezoresistive MEMS pressure sensor
Sensitivity with respect to physical change of any type of sensor depends upon structure of
the sensor and sensing material. If sensor is sensitive with more than single physical change …
the sensor and sensing material. If sensor is sensitive with more than single physical change …