Exploiting nonlinearities of micro-machined resonators for filtering applications

S Ilyas, KN Chappanda, MI Younis - Applied Physics Letters, 2017 - pubs.aip.org
We demonstrate the exploitation of the nonlinear behavior of two electrically coupled
microbeam resonators to realize a band-pass filter. More specifically, we combine their …

Locking of electrostatically coupled thermo-optically driven MEMS limit cycle oscillators

AT Zehnder, RH Rand, S Krylov - International Journal of Non-Linear …, 2018 - Elsevier
A model of coupled limit cycle oscillators is developed and analyzed to discover and map
out the system's locking behavior. This sixth order model is motivated by the physical …

Platform development for CMOS-MEMS multi-gap capacitive transducers

HY Chen, PI Shih, WR Ali, MH Li… - Journal of …, 2023 - ieeexplore.ieee.org
This work, for the first time, presents a platform for designing microelectromechanical system
(MEMS) capacitive transducers featuring multiple transduction gaps implemented by a …

A CMOS-integrated MEMS platform for frequency stable resonators-Part I: Fabrication, implementation, and characterization

CY Chen, MH Li, AA Zope, SS Li - Journal of …, 2019 - ieeexplore.ieee.org
This paper introduces the comprehensive design concepts, procedure, and post-process
flow of a robust manufacturing platform for complementary metal-oxide-semiconductor …

High-Q Support Transducer MEMS Resonators Enabled Low-Phase-Noise Oscillators

HT Jen, G Pillai, SI Liu, SS Li - IEEE Transactions on …, 2020 - ieeexplore.ieee.org
Structural and electrode material engineering methodology to attain quality factor
enhancement in a support transducer enabled Wine-glass and Lamé mode resonator has …

An experimental and theoretical investigation of electrostatically coupled cantilever microbeams

S Ilyas, KN Chappanda, MA Al Hafiz, A Ramini… - Sensors and Actuators A …, 2016 - Elsevier
We present an experimental and theoretical investigation of the static and dynamic behavior
of electrostatically coupled laterally actuated silicon microbeams. The coupled beam …

Static and dynamic amplification using strong mechanical coupling

S Ilyas, N Jaber, MI Younis - Journal of Microelectromechanical …, 2016 - ieeexplore.ieee.org
Amplifying the signal-to-noise ratio of resonant sensors is vital toward the effort to
miniaturize devices into the sub-micro and nano regimes. In this paper, we demonstrate …

Phase noise optimization of piezoelectric bulk mode MEMS oscillators based on phase feedback in secondary loop

CY Chang, G Pillai, SS Li - 2022 IEEE 35th International …, 2022 - ieeexplore.ieee.org
This work investigates the phase noise (PN) performance optimization technique based on
phase feedback scheme demonstrated by a 10MHz multiple-port piezoelectric support …

Methods for nonlinearities reduction in micromechanical beams resonators

D Chen, Y Wang, Y Guan, X Chen… - Journal of …, 2018 - ieeexplore.ieee.org
In this paper, two methods for reducing the nonlinearities in microelectromechanical systems
flexural beams resonators have been demonstrated with established theoretical models and …

Implementation of a CMOS-MEMS filter through a mixed electrical and mechanical coupling scheme

CY Chen, MH Li, CH Chin, SS Li - Journal of …, 2016 - ieeexplore.ieee.org
We propose a novel filter coupling scheme, which combines the merits of mechanically and
electrically coupled methods to enable a well-defined narrow bandwidth and a decent …