Progress and prospects in nanoscale dry processes: How can we control atomic layer reactions?

K Ishikawa, K Karahashi, T Ichiki… - Japanese Journal of …, 2017 - iopscience.iop.org
In this review, we discuss the progress of emerging dry processes for nanoscale fabrication.
Experts in the fields of plasma processing have contributed to addressing the increasingly …

Electrodeposition of nanocrystalline Cu for Cu-Cu direct bonding

JJ Jhan, K Wataya, H Nishikawa, CM Chen - Journal of the Taiwan Institute …, 2022 - Elsevier
Abstract Background Cu-Cu direct bonding is a promising technology to construct a
temperature resistant bonding structure for emerging power devices and vehicle electronics …

Impact of crystalline orientation on Cu–Cu solid-state bonding behavior by molecular dynamics simulations

H Tatsumi, CR Kao, H Nishikawa - Scientific Reports, 2023 - nature.com
High-density electronics are hindered by the constraints of Sn-based solder joints,
necessitating the exploration of Cu–Cu solid-state bonding. However, current bonding …

Cu-Cu joint with Sn-58Bi/Porous Cu/Sn-58Bi transient liquid phase bonding under formic acid atmosphere

B Xiong, S He, J Ge, Q Li, C Hu, H Yan… - Soldering & Surface …, 2024 - emerald.com
Purpose This paper aims to examine the effects of bonding temperature, bonding time,
bonding pressure and the presence of a Pt catalyst on the bonding strength of Cu/SB/P …

Combined surface activated bonding technique for low-temperature Cu/dielectric hybrid bonding

R He, M Fujino, A Yamauchi, Y Wang… - ECS Journal of Solid …, 2016 - iopscience.iop.org
Cu/dielectric hybrid bonding at low temperatures of no more than 200 C remains
challenging because of the different features of Cu-Cu and dielectric-dielectric (such as SiO …

In-situ observation of fluxless soldering of Sn-3.0 Ag-0.5 Cu/Cu under a formic acid atmosphere

S He, R Gao, J Li, YA Shen, H Nishikawa - Materials Chemistry and …, 2020 - Elsevier
Formic acid, which can provide efficient reduction for most solders, is widely used in fluxless
soldering. In this study, to establish a reliable fluxless soldering process, a formic acid …

Modulating catalytic oxygen activation over Pt–TiO 2/SiO 2 catalysts by defect engineering of a TiO 2/SiO 2 support

WH Saputera, TH Tan, EC Lovell, A Rawal… - Catalysis Science & …, 2022 - pubs.rsc.org
Binary TiO2/SiO2 oxides were synthesized via flame spray pyrolysis as supports for a Pt
catalyst. The effect of the mole ratio of the silica on the catalyst characteristics and catalytic …

Low temperature de-oxidation for copper surface by catalyzed formic acid vapor

PW Chou, JM Song, ZY Xie, M Akaike, T Suga… - Applied Surface …, 2018 - Elsevier
This study investigated low temperature reduction of copper oxides using modified formic
acid vapor treatment with Pt catalysts in terms of reaction kinetics and mechanisms. An in …

Thermogravimetric investigation on the interaction of formic acid with solder joint materials

F Conti, A Hanss, C Fischer, G Elger - New Journal of Chemistry, 2016 - pubs.rsc.org
Soldering is a dominating process for semiconductor packaging. For electronic
manufacturing tin based solders play a key role. The surface of most solder alloys is …

Robust Ag-Cu Sintering Bonding at 160 °C via Combining Ag2O Microparticle Paste and Pt-Catalyzed Formic Acid Vapor

L He, J Li, X Wu, F Mu, Y Wang, Y Lu, T Suga - Metals, 2020 - mdpi.com
With the assistance of Pt-catalyzed formic acid vapor, robust Ag-Cu bonding was realized at
an ultra-low temperature of 160° C under 3 MPa for 30 min via the sintering of Ag …