This review paper focuses on interdigital electrodes-a geometric structure encountered in a
wide variety of sensor and transducer designs. Physical and chemical principles behind the …

Polymer materials, including elastomers, plastics and fibers, are being actively used for
MEMS sensors and actuators. Polymer materials provide many advantages in terms of cost …

Why write another book on mechanics? There are, after all, a number of excellent texts that
describe in great detail the way classical solids behave when acted upon by static and time …

The design, fabrication and experimental results of lateral-comb-drive actuators for large
displacements at low driving voltages is presented. A comparison of several suspension …

The Mathieu equation governs the forced motion of a swing, the stability of ships and
columns, Faraday surface wave patterns on water,, the dynamics of electrons in Penning …

This thesis describes a general system simulation of microelectromechanical systems
(MEMS) based on lumped-parameter modeling. First-order analytic models are derived for …

A completely monolithic high-Q oscillator, fabricated via a combined CMOS plus surface
micromachining technology, is described, for which the oscillation frequency is controlled by …

Microelectromechanical filters based on coupled lateral microresonators are demonstrated.
This new class of microelectromechanical systems (MEMS) has potential signal-processing …

Silicon dioxide and silicon nitride coatings are preferably used as dielectric layers for short-
circuit protection in capacitive silicon microsensors and microactuators. However, their …

This paper presents the design and performance of an electrostatic actuator consisting of a
laterally compliant cantilever beam and a fixed curved electrode, both suspended above a …