State of the art review on process, system, and operations control in modern manufacturing
D Djurdjanovic, L Mears… - Journal of …, 2018 - asmedigitalcollection.asme.org
Dramatic advancements and adoption of computing capabilities, communication
technologies, and advanced, pervasive sensing have impacted every aspect of modern …
technologies, and advanced, pervasive sensing have impacted every aspect of modern …
A uniaxial testing approach for consistent failure in vascular tissues
Although uniaxial tensile testing is commonly used to evaluate failure properties of vascular
tissue, there is no established protocol for specimen shape or gripping method. Large …
tissue, there is no established protocol for specimen shape or gripping method. Large …
Adaptive weight tuning of EWMA controller via model-free deep reinforcement learning
Z Ma, T Pan - IEEE Transactions on Semiconductor …, 2022 - ieeexplore.ieee.org
Exponentially weighted moving average (EWMA) controllers have been extensively studied
for run-to-run (RtR) control in semiconductor manufacturing processes. However, the EWMA …
for run-to-run (RtR) control in semiconductor manufacturing processes. However, the EWMA …
Reinforcement learning for process control with application in semiconductor manufacturing
Process control is widely discussed in the manufacturing process, especially in
semiconductor manufacturing. Due to unavoidable disturbances in manufacturing, different …
semiconductor manufacturing. Due to unavoidable disturbances in manufacturing, different …
MFRL-BI: Design of a model-free reinforcement learning process control scheme by using Bayesian inference
Abstract Design of the process control scheme is critical for quality assurance to reduce
variations in manufacturing systems. Taking semiconductor manufacturing as an example …
variations in manufacturing systems. Taking semiconductor manufacturing as an example …
Modeling and analysis of nonlinear wave propagation in one-dimensional phononic structures
M Liu, WD Zhu - Journal of Vibration and Acoustics, 2018 - asmedigitalcollection.asme.org
Different from elastic waves in linear periodic structures, those in phononic crystals (PCs)
with nonlinear properties can exhibit more interesting phenomena. Linear dispersion …
with nonlinear properties can exhibit more interesting phenomena. Linear dispersion …
Deep reinforcement learning-assisted extended state observer for run-to-run control in the semiconductor manufacturing process
Z Ma, T Pan - Transactions of the Institute of Measurement …, 2024 - journals.sagepub.com
In the semiconductor manufacturing process, extended state observer (ESO)-based run-to-
run (RtR) control is an intriguing solution. Although an ESO-RtR control strategy can …
run (RtR) control is an intriguing solution. Although an ESO-RtR control strategy can …
Process and operations control in modern manufacturing
D Djurdjanovic, L Mears… - International …, 2017 - asmedigitalcollection.asme.org
Dramatic advancements and adoption of computing capabilities, communication
technologies, and advanced, pervasive sensing have impacted every aspect of modern …
technologies, and advanced, pervasive sensing have impacted every aspect of modern …
Cycle forecasting EWMA (CF-EWMA) approach for drift and fault in mixed-product run-to-run process
In semiconductor manufacturing processes, mixed-products are usually fabricated on the
same set of process tool with different recipes. Run-to-run controllers which based on the …
same set of process tool with different recipes. Run-to-run controllers which based on the …
A batch-based run-to-run process control scheme for semiconductor manufacturing
K Wang, K Han - IIE Transactions, 2013 - Taylor & Francis
Run-to-Run (R2R) control has been widely used in semiconductor manufacturing to
compensate for process disturbance and to improve quality. The traditional R2R controller …
compensate for process disturbance and to improve quality. The traditional R2R controller …