Model-free adaptive iterative learning control method for the Czochralski silicon monocrystalline batch process

JC Ren, D Liu, Y Wan - IEEE Transactions on Semiconductor …, 2021 - ieeexplore.ieee.org
Model-based control methods do not produce satisfactory control results with the batch
process control of Czochralski (CZ) silicon monocrystalline with complex nonlinearity, large …

Modeling and application of Czochralski silicon single crystal growth process using hybrid model of data-driven and mechanism-based methodologies

JC Ren, D Liu, Y Wan - Journal of Process Control, 2021 - Elsevier
Czochralski (Cz) silicon single crystal growth process is a large delay, nonlinear dynamic
time-varying system with complex physicochemical reactions, multi-field and multi-phase …

Simulation of thermoelastic coupling in silicon single crystal growth based on alternate two-stage physics-informed neural network

S Shi, D Liu, Z Huo - Engineering Applications of Artificial Intelligence, 2023 - Elsevier
This paper proposes a alternate physics-informed neural network (PINN) with a two-stage
training strategy to solve the thermoelastic coupling in the growth of Czochralski silicon …

Review of simulation and modeling techniques for silicon Czochralski crystal growth

ARA Dezfoli - Journal of Crystal Growth, 2024 - Elsevier
Discussion Given the inherent complexity of the simulations previously discussed, the
validity of the models in question remains a significant concern. The multitude of …

[PDF][PDF] A review of the automation of the Czochralski crystal growth process

J Winkler, M Neubert, J Rudolph - Acta Physica Polonica A, 2013 - bibliotekanauki.pl
On the occasion of the centennial of the invention of the Czochralski crystal growth process
by the Polish scientist Jan Czochralski, a review of selected strategies for the automatic …

[HTML][HTML] Development and validation of a thermal simulation for the Czochralski crystal growth process using model experiments

A Enders-Seidlitz, J Pal, K Dadzis - Journal of Crystal Growth, 2022 - Elsevier
The Czochralski (CZ) process is one of the most important techniques for the production of
bulk single crystals. Various numerical models for CZ growth furnaces exist, however, a …

Transient global modeling for the pulling process of Czochralski silicon crystal growth. II. Investigation on segregation of oxygen and carbon

X Liu, H Harada, Y Miyamura, X Han, S Nakano… - Journal of Crystal …, 2020 - Elsevier
We conducted the transient global simulations for the crystal pulling process of Czochralski
silicon (CZ-Si) growth with the cusp-shaped magnetic field (CMF). The generation, transport …

Transient global modeling for the pulling process of Czochralski silicon crystal growth. I. Principles, formulation, and implementation of the model

X Liu, H Harada, Y Miyamura, X Han, S Nakano… - Journal of Crystal …, 2020 - Elsevier
A transient global model for the crystal pulling process was developed for magnetic-field-
applied Czochralski silicon (CZ-Si) growth. Heat transfer by solid conduction, melt …

Investigation of Facetted Growth in Heavily Doped Silicon Crystals Grown in Mirror Furnaces

S Gruner, C Kranert, T Jauß, T Sorgenfrei, C Reimann… - Crystals, 2022 - mdpi.com
Herein, facets and related phenomena are studied for silicon crystals grown in the< 100>
and< 111> directions, using the Zone Melting and Floating Zone techniques. Investigating …

Effect of the pulling, crystal and crucible rotation rate on the thermal stress and the melt–crystal interface in the Czochralski growth of germanium crystals

M Saadatirad, MH Tavakoli, H Khodamoradi… - …, 2021 - pubs.rsc.org
A set of two-dimensional numerical simulations of the Czochralski growth of germanium
crystals were performed in order to study the effect of the crystal pulling rate and …