The electromigration (EM) activation energy (EA) of alternative metals, such as Ru and Co, was obtained using low-frequency noise (LFN) measurements. High activation energies …
High-dielectric constant (high-k) gate oxides and low-dielectric constant (low-k) interlayer dielectrics (ILD) have dominated the nanoelectronic materials research scene over the past …
1.8-MeV proton irradiation to a fluence of 10 14/cm 2 does not significantly affect the resistance or low-frequency noise of copper or ruthenium resistors fabricated via modern …
A new electromigration (EM) test method, based on low-frequency noise (LFN) measurements is demonstrated and validated for advanced nano-interconnects …
This paper demonstrates the deteriorating electromigration (EM) reliability of Cu interconnects when scaling the metal pitch from 54 to 44nm. The study is carried out using a …
A model explaining Lorentzian low-frequency noise spectra observed in electronic interconnects is presented. The model is based on the interaction of electrons with …
In this paper we discuss a new EM test methodology, based on low-frequency noise (LFN) measurements. The main advantages of LFN over the standard accelerated EM tests are …
S Beyne, T Beyne - 25th International Conference on Noise and …, 2019 - infoscience.epfl.ch
The output current fluctuations in metallic interconnects exhibit fluctuation scaling. The temperature dependence of the scaling exponent is analyzed and found to increase up to a …