A review of design approaches for the implementation of low-frequency noise measurement systems

G Scandurra, C Ciofi, J Smulko, H Wen - Review of Scientific …, 2022 - pubs.aip.org
Electronic noise has its roots in the fundamental physical interactions between matter and
charged particles, carrying information about the phenomena that occur at the microscopic …

Electromigration activation energies in alternative metal interconnects

S Beyne, OV Pedreira, H Oprins… - … on Electron Devices, 2019 - ieeexplore.ieee.org
The electromigration (EM) activation energy (EA) of alternative metals, such as Ru and Co,
was obtained using low-frequency noise (LFN) measurements. High activation energies …

Beyond the highs and lows: A perspective on the future of dielectrics research for nanoelectronic devices

M Jenkins, DZ Austin, JF Conley, J Fan… - ECS Journal of Solid …, 2019 - iopscience.iop.org
High-dielectric constant (high-k) gate oxides and low-dielectric constant (low-k) interlayer
dielectrics (ILD) have dominated the nanoelectronic materials research scene over the past …

[HTML][HTML] Low-frequency noise and defects in copper and ruthenium resistors

DM Fleetwood, S Beyne, R Jiang, SE Zhao… - Applied Physics …, 2019 - pubs.aip.org
1.8-MeV proton irradiation to a fluence of 10 14/cm 2 does not significantly affect the
resistance or low-frequency noise of copper or ruthenium resistors fabricated via modern …

A novel electromigration characterization method based on low-frequency noise measurements

S Beyne, OV Pedreira, I De Wolf… - Semiconductor …, 2019 - iopscience.iop.org
A new electromigration (EM) test method, based on low-frequency noise (LFN)
measurements is demonstrated and validated for advanced nano-interconnects …

Low-frequency noise measurements to characterize cu-electromigration down to 44nm metal pitch

S Beyne, OV Pedreira, I De Wolf… - 2019 IEEE …, 2019 - ieeexplore.ieee.org
This paper demonstrates the deteriorating electromigration (EM) reliability of Cu
interconnects when scaling the metal pitch from 54 to 44nm. The study is carried out using a …

Low-frequency noise and thermal equilibrium properties of vacancies

S Beyne, ID Wolf, Z Tőkei, K Croes - Applied Physics Letters, 2020 - pubs.aip.org
A model explaining Lorentzian low-frequency noise spectra observed in electronic
interconnects is presented. The model is based on the interaction of electrons with …

Low-Frequency Noise Measurements for Electromigration Characterization in BEOL Interconnects

S Beyne, K Croes, OV Pedreira… - 2019 IEEE …, 2019 - ieeexplore.ieee.org
In this paper we discuss a new EM test methodology, based on low-frequency noise (LFN)
measurements. The main advantages of LFN over the standard accelerated EM tests are …

[PDF][PDF] Fluctuation Scaling in Nano-Interconnects and its Application to Electromigration

S Beyne, T Beyne - 25th International Conference on Noise and …, 2019 - infoscience.epfl.ch
The output current fluctuations in metallic interconnects exhibit fluctuation scaling. The
temperature dependence of the scaling exponent is analyzed and found to increase up to a …