AlN piezoelectric thin films for energy harvesting and acoustic devices
Aluminum nitride (AlN) thin films are widely investigated due to their unique physical
properties and applications in energy harvesting devices, ultrasonic transducers …
properties and applications in energy harvesting devices, ultrasonic transducers …
Piezoelectric MEMS vibrational energy harvesters: Advances and outlook
MT Todaro, F Guido, V Mastronardi, D Desmaele… - Microelectronic …, 2017 - Elsevier
Piezoelectric MEMS energy harvesters based on thin films are compact and cost-effective
microgenerators for scavenging environmental vibrations. This technology is promising for …
microgenerators for scavenging environmental vibrations. This technology is promising for …
Group III nitride and SiC based MEMS and NEMS: materials properties, technology and applications
V Cimalla, J Pezoldt, O Ambacher - Journal of Physics D: Applied …, 2007 - iopscience.iop.org
With the increasing requirements for microelectromechanical systems (MEMS) regarding
stability, miniaturization and integration, novel materials such as wide band gap …
stability, miniaturization and integration, novel materials such as wide band gap …
A micro inertial energy harvesting platform with self-supplied power management circuit for autonomous wireless sensor nodes
EE Aktakka, K Najafi - IEEE Journal of Solid-State Circuits, 2014 - ieeexplore.ieee.org
A 0.25 cm 3 autonomous energy harvesting micro-platform is realized to efficiently
scavenge, rectify and store ambient vibration energy with batteryless cold start-up and zero …
scavenge, rectify and store ambient vibration energy with batteryless cold start-up and zero …
Investigation and review of the thermal, mechanical, electrical, optical, and structural properties of atomic layer deposited high-k dielectrics: Beryllium oxide, aluminum …
JT Gaskins, PE Hopkins, DR Merrill… - ECS Journal of Solid …, 2017 - iopscience.iop.org
Atomic layer deposited (ALD) high-dielectric-constant (high-k) materials have found
extensive applications in a variety of electronic, optical, optoelectronic, and photovoltaic …
extensive applications in a variety of electronic, optical, optoelectronic, and photovoltaic …
Flexible piezoelectric pressure sensors using oriented aluminum nitride thin films prepared on polyethylene terephthalate films
M Akiyama, Y Morofuji, T Kamohara… - Journal of applied …, 2006 - pubs.aip.org
We have investigated the high sensitive piezoelectric response of c-axis oriented aluminum
nitride (AlN) thin films prepared on polyethylene terephthalate (PET) films. The AlN films …
nitride (AlN) thin films prepared on polyethylene terephthalate (PET) films. The AlN films …
Flexible piezoelectric energy-harvesting exploiting biocompatible AlN thin films grown onto spin-coated polyimide layers
L Algieri, MT Todaro, F Guido… - ACS Applied Energy …, 2018 - ACS Publications
The increasing demand of piezoelectric energy harvesters for wearable and implantable
applications requires biocompatible materials and careful structural device design, paying …
applications requires biocompatible materials and careful structural device design, paying …
Mechanical properties and reliability of aluminum nitride thin films
E Österlund, J Kinnunen, V Rontu, A Torkkeli… - Journal of Alloys and …, 2019 - Elsevier
Abstract Knowledge of the mechanical properties and fatigue behavior of thin films is
important for the design and reliability of microfabricated devices. This study uses the bulge …
important for the design and reliability of microfabricated devices. This study uses the bulge …
Reactive magnetron sputtered AlN thin films: structural, linear and nonlinear optical characteristics
This study investigates the structural and optical characteristics of aluminum nitride (AlN)
thin films deposited using reactive magnetron sputtering (dcMS) in an Ar+ N2 (80: 20%) …
thin films deposited using reactive magnetron sputtering (dcMS) in an Ar+ N2 (80: 20%) …
Separation of intra-and intergranular magnetotransport properties in nanocrystalline diamond films on the metallic side of the metal–insulator transition
SD Janssens, P Pobedinskas, J Vacik… - New Journal of …, 2011 - iopscience.iop.org
A systematic study on the morphology and electronic properties of thin heavily boron-doped
nanocrystalline diamond (NCD) films is presented. The films have nominally the same …
nanocrystalline diamond (NCD) films is presented. The films have nominally the same …