Study on the effect of 65 nm NMOS transistor using SILVACO TCAD

AA Tarmizi, AF Abd Rahim, NSM Razali… - Materials Today …, 2023 - Elsevier
This work aims to study the effect of the short gate length of 65 nm NMOS transistor using
SILVACO TCAD. A 65 nm NMOS was designed and virtually fabricated and characterized …