Y Zhang, J Duan, Y Liang, W Wang… - … Devices and ICs …, 2024 - ieeexplore.ieee.org
We investigate GaN HEMT devices with a crystalline GaO_x/GaO_xN_1-x passivation layer.
The p-GaN layer, subjected to oxygen plasma treatment (OPT) and post-annealing process …