There is an indispensable need for fluid flow rate and direction sensors in various medical,
industrial and environmental applications. Besides the critical demands on sensing range of …

Single-pixel imaging technology is an attractive technology considering the increasing
demand of imagers that can operate in wavelengths where traditional cameras have limited …

In this work, we address the modelling of piezo-micromirrors with large opening angles. We
focus on various sources of nonlinearites induced by the interaction with the surrounding …

This study introduces a novel image capture and lighting techniques using a cutting-edge
hybrid MEMS scanner system designed for compact microscopic imaging. The scanner …

This paper reports a highly c-axis oriented 0.06 Pb (Mn 1/3, Nb 2/3) O 3-0.94 Pb (Zr 0.5, Ti
0.5) O 3 (PMnN-PZT) epitaxial thin film sputter-deposited on a Si substrate for MEMS …

We propose a couple stress based isogeometric analysis (IGA) model for the study of active
vibration control in periodic piezoelectric microplate coupled systems. The model integrates …

A micromirror with piezoelectric thin film aluminum nitride (AIN) as transducer material for
actuation and detection is presented. Four sensor elements are integrated for closed-loop …

Over the last decade, optical fiber-based forms of microscopy and endoscopy have
extended the realm of applicability for many imaging modalities. Optical fiber-based imaging …

This paper presents a systematic approach to transduction optimization of resonant piezo-
based MEMS devices. The method is based on inverse design approach using direct …

This paper reports on the successful implementation of an aluminum nitride (AlN)
piezoelectric film for the fabrication of a large-aperture MEMS scanning micromirror. To …