(54) METHOD AND DEVICE FOR FABRICATING 5,504,614 A 4, 1996 Webb et al. A
RELEASE STRUCTURE TO FACLITATE 5,535,047 A 7/1996 Hornbeck BONDING OF …

Disclosed herein is a micromirror device having in-plane deformable hinge to which a
deflectable and reflective mirror plate is attached. The mirror plate rotates to different angles …

Embodiments of the present invention generally relate to a device that has an improved
usable lifetime due to the presence of a lubricant that reduces the likelihood of stiction …

Embodiments of the present invention generally relate to a device that has an improved
usable lifetime due to the pres ence of a lubricant that reduces the likelihood of stiction …

Embodiments of the present invention generally relate to a device that has an improved
usable lifetime due to the presence of a lubricant that reduces the likelihood of stiction …

BACKGROUND 0001 Micro-electromechanical systems (MEMS) are used in a variety of
applications such as optical display systems. Such MEMS devices have been developed …

One embodiment of an micromechanical device includes a? rst contact surface, a moveable
component having a second contact surface, and a coating of liquid or solid lubricant on at …

US7372615B2 - Method of operating a micromechanical device that contains anti-stiction
gas-phase lubricant - Google Patents US7372615B2 - Method of operating a …

Embodiments of the present invention generally relate to a process of forming a device that
has an improved usable lifetime due to the addition of a gas-phase lubricant that reduces …

One embodiment of an micromechanical device includes a first contact surface, a moveable
component having a second contact surface, where the second contact surface interacts …