An effective heat of formation (EHF) model for predicting compound phase formation
sequence is described. The EHF model defines an effective heat of formation ΔH′, which is …

Laser-Assisted Microtechnology deals with laser applications to a wide variety of problems
in microelectronic design and fabrication. It covers micromachining of thin films …

Laser-Beam Interactions with Materials treats, from a physicist's point of view, the wide
variety of processes that lasers can induce in materials. Physical phenomena ranging from …

Ion Implantation and Beam Processing covers the scientific and technological advances in
the fields of ion implantation and beam processing. The book discusses the amorphization …

Laser alloying is a material-processing method which utilizes the high power density
available from focused laser sources to melt metal coatings and a portion of the underlying …

The annealing of semiconductors is of critical importance for successful electronic device
fabrication. The present review surveys the new field of transient annealing and covers all …

Materials processing with lasers is a rapidly expanding field which is increasingly
captivating the attention of scientists, engineers and manufacturers alike. The aspect of most …

ABSTRACT Epitaxial growth of Pd 2 Si films on Si (lll) substrates by scanning cw electron
beam annealing is investigated theoretically and experimentally. First, the nonlinear heat …

During the past three years, phenomena associated with pulsed and cw laser annealing of
semiconductors have generated intense interest among scientists in both fundamental and …

Ultraviolet nanosecond laser annealing (UV-NLA)-based silicidation is a promising
technology for reducing the thermal budget in the fabrication of highly integrated …