This paper presents the characterization of two prototyped fully integrated 62+ 62 row–
column-addressed (RCA) 2-D transducer array probes, which are based on capacitive …

This paper addresses the importance of having control over the resistivity of the electrodes
for capacitive micromachined ultrasonic transducers (CMUTs) devices. The electrode …

This article presents a row-column (RC) capacitive micromachined ultrasonic transducer
(CMUT) array fabricated using anodic bonding on a borosilicate glass substrate. This is …

This paper presents an inexpensive, low temperature and rapid fabrication method for
capacitive micromachined ultrasonic transducers (CMUT). The fabrication utilizes the …

Cardiovascular disease (CVD) is a leading cause of death. As human and rodent hearts
have very similar morphologies and developmental processes, mice are excellent models …

This paper presents the design, fabrication, and characterization of a 190+ 190 row-column
addressed (RCA) capacitive micromachined ultrasonic transducer (CMUT) array integrated …

This work presents the fabrication process of anodically bonded 192+ 192 2D row-column
addressed (RCA) capacitive micromachined ultrasonic transducer (CMUT) arrays. Four …

This paper presents a novel fabrication design for capacitive micromachined ultrasonic
transducers (CMUT) that utilizes a designed delay line in the silicon substrate for element …

In this work, we present preliminary characterization results from a 32 x 32 row-column (RC)
addressed 2D capacitive micromachined ultrasonic transducer (CMUT) array. The device …

A capacitive micromachined ultrasonic transducer (CMUT), 8 MHz resonance frequency, λ/2
cell pitch 188+ 188 row-column addressed (RCA) array for super resolution imaging is …