Copper, silver, and gold targets were sputtered in various reactive gas mixtures (Ar–N2, Ar–
O2, and Ar–CH4) to compare the reactivity of noble metal atoms during the sputtering …

Oxycarbides were produced by pyrolysis of polysiloxanes with different contents of
methyl/phenyl groups at 1000° C under nitrogen atmosphere. The structure of the three …

Hydrogenated amorphous SiC thin films deposited at low substrate temperature (100° C)
show the different bonding configurations and microstructures which depend on the carbon …

Hydrogenated amorphous silicon carbide (a-SiC: H) films, which contain sp 3 hybridized
carbon phase embedded in a-SiC: H matrix were fabricated by a radio frequency (13.56 …

The use of very high frequency (VHF) plasma enhanced chemical vapor deposition in a
capacitive discharge is investigated to fabricate hydrogenated amorphous silicon carbon …

Electron transport behavior of polymer‐derived amorphous silicoboron carbonitride (a‐
SiBCNs) ceramics was studied by measuring DC/AC conductivities and optical absorption …

Hydrogenated amorphous silicon carbon (a-SiC: H) films were deposited using pure SiH4
and C2H2 without hydrogen dilution by hot wire chemical vapor deposition (HWCVD) …

The room temperature photoluminescence characteristics of a-SiC x: H thin films, deposited
by plasma enhanced chemical vapor deposition technique with various carbon contents (x) …

The filament temperature (TF) is determined to be a critical parameter for the deposition of
HWCVD deposited a-SiC: H films. More carbon atoms are incorporated into the films in the …

The electronic structure of polymer‐derived amorphous silicon carbide pyrolyzed at different
temperatures was investigated by combining measurements of their temperature‐dependent …