Virtual metrology (VM) involves estimating a product's quality directly from production
process data without physically measuring it. This enables the product quality of each unit of …

Data-driven science and technology offer transformative tools and methods to science. This
review article highlights the latest development and progress in the interdisciplinary field of …

The 2022 Roadmap is the next update in the series of Plasma Roadmaps published by
Journal of Physics D with the intent to identify important outstanding challenges in the field of …

Machine learning has had an enormous impact in many scientific disciplines. It has also
attracted significant interest in the field of low-temperature plasma (LTP) modeling and …

This roadmap reviews the new, highly interdisciplinary research field studying the behavior
of condensed matter systems exposed to radiation. The Review highlights several recent …

This paper comprehensively explores the integration of machine learning (ML) with
atmospheric pressure plasma, highlighting its transformative impact in areas, such as …

Meter-scale of the large area inductively coupled plasma etchers with the capacitive power
coupling are widely applied for the mass production of OLED (organic light emitting diode) …

In this paper, we review the development of plasma engineering technology that improves
dramatically the production efficiency of OLED (organic light-emitting diode) displays and …

Due to increasing demand on the fabrication yield and throughput in micro/nanoscale
manufacturing, virtual metrology (VM) has emerged as an effective data-based approach for …

Ion-induced etch damage on trench surfaces of Ge 2 Sb 2 Te 5 (GST) by reactive ion etching
(RIE) is investigated with Ar/SF 6 capacitively coupled plasma (CCP). Etch damage on the …