MEMS switch is a movable device manufactured by means of semiconductor technology,
possessing many incomparable advantages such as a small volume, low power …

This paper presents a comprehensive review of the reliability issues hampering capacitive
RF MEMS switches in their development toward commercialization. Dielectric charging and …

Microelectromechanical systems (MEMS) switches are attractive for many applications
including radio frequency and microwave systems, logic devices, acceleration sensing and …

The long-term reliability of MEMS devices related to the dielectric charging phenomenon is
one of the main hurdles in the commercialization of these devices. This paper presents a …

The potential distribution in a MEMS capacitor with a thin dielectric film on the bottom
electrode and under the presence of field emission leakage current is presented for the first …

Electret materials find use in various applications, such as microphones or filter media. In
recent years, electrets have been used also increasingly on the micrometer scale, for …

The present paper aims to provide a better insight to the electrical characteristics of silicon
nitride films that have been deposited with PECVD method under different conditions. The …

The present paper provides a novel, inexpensive and non-destructive method to assess the
surface charge density variance in capacitive RF-MEMS switches. The charge variance …

The dependence of the electrical properties of silicon nitride, which is a commonly used
dielectric in nano-and micro-electromechanical systems (NEMS and MEMS), on the …

Nanotribology and nanomechanics studies are needed to develop a fundamental
understanding of interfacial phenomena on a small scale, and to study interfacial …