The article provides a review of the current state of affairs in the field of physics and
technology of multilayer beryllium-containing mirrors intended for projection lithography and …

Aperiodic multilayer structures in soft X-ray optics - IOPscience This site uses cookies. By
continuing to use this site you agree to our use of cookies. To find out more, see our Privacy and …

We formulate an approach to the development of stigmatic high-resolution spectral
instruments for the soft X-ray range $(\lambda\leqslant 300\\mathring {\text {A}}) $, which is …

Considering the random fluctuations of the layer thickness, a method of robust design of
broadband EUV multilayers based on multi-objective evolutionary algorithm is presented …

We have analysed the capabilities of flat-field spectrometers with concave VLS reflection
gratings from the standpoint of spectral imaging in the soft X-ray range. Two types of such …

A broadband stigmatic (imaging) soft X-ray (λ> 120 Å) spectrometer is experimentally
realised. The optical configuration of the spectrometer comprises a plane grazing-incidence …

A compact undulator-based soft X-ray radiation source furnishing the laser wakefield
electron acceleration concept is currently being developed at ELI-Beamlines in the Czech …

Даётся обзор современного состояния области физики и технологии многослойных
бериллийсодержащих зеркал, предназначенных для проекционной литографии и …

By methods of cross-sectional transmission electron microscopy and small-angle x-ray
scattering (λ= 0.154 nm) the influence of Ar gas pressure (1 to 4 mTorr) on the growth of …

We review a number of instruments employed in a high-intensity J-KAREN-P laser-solid
interaction experiment and discuss the applicability of the diagnostics to the best target …