[HTML][HTML] MEMS mirrors for LiDAR: A review

D Wang, C Watkins, H Xie - Micromachines, 2020 - mdpi.com
In recent years, Light Detection and Ranging (LiDAR) has been drawing extensive attention
both in academia and industry because of the increasing demand for autonomous vehicles …

A monolithically integrated large-scale optical phased array in silicon-on-insulator CMOS

SW Chung, H Abediasl… - IEEE Journal of Solid-State …, 2017 - ieeexplore.ieee.org
A large-scale monolithic silicon nanophotonic phased array on a chip creates and
dynamically steers a high-resolution optical beam in free space, enabling emerging …

Monolithically integrated large-scale optical phased array

H Hashemi, SW Chung, H Abediasl - US Patent 10,656,496, 2020 - Google Patents
An optical device includes a row of optical units, each of the optical units comprising an
antenna element and an associated phase shifting element, a first optical power splitter …

[HTML][HTML] Hetero-integration enables fast switching time-of-flight sensors for light detection and ranging

M Park, Y Baek, M Dinare, D Lee, KH Park, J Ahn… - Scientific Reports, 2020 - nature.com
The time-of-flight (ToF) principle is a method used to measure distance and construct three-
dimensional (3D) images by detecting the time or the phase difference between emitted and …

[HTML][HTML] Dynamic beam steering and focusing graphene metasurface mirror based on fermi energy control

S Yu, Y Kim, E Shin, SH Kwon - Micromachines, 2023 - mdpi.com
Beam steering technology is crucial for radio frequency and infrared telecommunication
signal processing. Microelectromechanical systems (MEMS) are typically used for beam …

Fast and wide-range optical beam steering with ultralow side lobes by applying an optimized multi-circular optical phased array

F Zhang, D Zhang, S Pan - Applied Optics, 2018 - opg.optica.org
A multi-circular optical phased array (OPA) is proposed and investigated through simulation
to realize fast and wide-range optical beam steering with ultralow side lobes. The proposed …

Design and fabrication of MEMS reflectors for THz reflect-arrays

L Schmitt, X Liu, A Czylwik… - 2021 Fourth International …, 2021 - ieeexplore.ieee.org
We present the design and fabrication of MEMS reflectors intended to be part of a
mechanical terahertz (THz) beam steering reflect-array. Each reflector is shifted by a …

A MEMS optical phased array based on pitch tunable silicon micromirrors for LiDAR scanners

T Mohammad, S He, RB Mrad - Journal of …, 2021 - ieeexplore.ieee.org
This paper presents the design, modeling, fabrication, and testing of an optical phased array
(OPA) based scanner utilizing microelectromechanical system (MEMS) micromirrors with in …

[HTML][HTML] Diffraction-based optical switching with MEMS

PA Blanche, L LaComb, Y Wang, MC Wu - Applied Sciences, 2017 - mdpi.com
We are presenting an overview of MEMS-based (Micro-Electro-Mechanical System) optical
switch technology starting from the reflective two-dimensional (2D) and three-dimensional …

MEMS-based linear micromirror array with a high filling factor for spatial light modulation

X Xiao, X Dong, Y Yu - Optics Express, 2021 - opg.optica.org
A smart digital micromirror device (DMD) was employed to realize the on-chip scanning in
versatile hyperspectral imaging (HSI) systems in our previous research. However, the …