MEMS inductor fabrication and emerging applications in power electronics and neurotechnologies

HT Le, RI Haque, Z Ouyang, SW Lee, SI Fried… - Microsystems & …, 2021 - nature.com
MEMS inductors are used in a wide range of applications in micro-and nanotechnology,
including RF MEMS, sensors, power electronics, and Bio-MEMS. Fabrication technologies …

Hexaferrite composites with sintering-induced texture for Snoek's product enhancement and magnetic loss suppression

C Wu, Y Li, Q Li, Z Ma, T Deng, Z Li, X Jiang, K Sun… - Acta Materialia, 2023 - Elsevier
Hexaferrites with high permeability and low magnetic loss have been attracting great
attention from both academic and industrial communities as promising high-frequency …

A comparison review of the resonant gate driver in the silicon MOSFET and the GaN transistor application

B Sun, Z Zhang, MAE Andersen - IEEE Transactions on …, 2019 - ieeexplore.ieee.org
The increasing transistor power loss brought by the high switching frequency places a limit
to the future high power density converter design. A review of resonant gate drivers is given …

High-Q Three-Dimensional Microfabricated Magnetic-Core Toroidal Inductors for Power Supplies in Package

HT Le, Y Nour, Z Pavlovic, C O'Mathúna… - … on power electronics, 2018 - ieeexplore.ieee.org
The integration of power inductors is a roadblock in realizing highly miniaturized power
supply in package (PSiP) and power supply on chip. Inductors in such power systems are …

A micro-inductor with thin film magnetic core for a 20 MHz buck converter

S Peng, J Yu, C Feeney, T Ye, Z Zhang… - Journal of Magnetism and …, 2021 - Elsevier
A micro-inductor has been fabricated on silicon substrate using a Micro-Electromechanical
Systems (MEMS) process. The micro-inductor has a single layer copper winding …

Photolithography of SU-8 microtowers for a 100-turn, 3-D toroidal microinductor

JJK Kim, H Al Thuwaini, M Almuslem - Micro and Nano Systems Letters, 2018 - Springer
We present a photolithography scheme for ultra-tall, high-aspect-ratio microstructures. While
increased height of microstructures can expand the design capability of various …

Analytical expressions for inductances of 3-D air-core inductors for integrated power supply

C Shetty, Y Kandeel, L Ye, S O'Driscoll… - IEEE Journal of …, 2021 - ieeexplore.ieee.org
This work presents analytical expressions for the dc inductance of 3-D air-core inductors
with circular cross-sectional pillars (CCSPs) and rectangular cross-sectional pillars …

Multi-mode Sequence Modeling Method for Accurate Description of VHF Resonant Converters Based on Mixed Logical Inequalities

Y Fang, Y Chen, B Zhang, D Qiu - IEEE Transactions on Power …, 2024 - ieeexplore.ieee.org
Due to the high operating frequency and the fact that they usually work in resonant soft-
switching mode, very-high-frequency (VHF) converters are characterized by multiple modes …

Capacitive wireless power transfer system with inductorless receiver side

X Chen, J Huang, Y Dou, Z Zhang… - … on Circuits and …, 2021 - ieeexplore.ieee.org
In a capacitive wireless power transfer system, due to the pF-level coupling capacitance,
resonant inductors are commonly used at the primary side to boost voltage and at secondary …

Embedded magnetic solenoid inductor into organic packaging substrate using lithographic via technology for power supply module integration

W Zhang, G Zhou, Q Gao, W Jia, X Chen… - … on Electron Devices, 2022 - ieeexplore.ieee.org
In this article, an embedded magnetic solenoid inductor into an organic packaging substrate
is implemented based on lithographically defined vias with a semiadditive process flow. In …