Plasmonic lithography: recent progress

F Hong, R Blaikie - Advanced Optical Materials, 2019 - Wiley Online Library
Plasmonic lithography has received extensive attention as both a potential candidate for
next generation lithography and as an interesting testbed to test the fundamental resolution …

Plasmonic structures, materials and lenses for optical lithography beyond the diffraction limit: a review

C Wang, W Zhang, Z Zhao, Y Wang, P Gao, Y Luo… - Micromachines, 2016 - mdpi.com
The rapid development of nanotechnologies and sciences has led to the great demand for
novel lithography methods allowing large area, low cost and high resolution nano …

Green nanotechnology

GB Smith - Nanostructured thin films IV, 2011 - spiedigitallibrary.org
Nanotechnology, in particular nanophotonics, is proving essential to achieving green
outcomes of sustainability and renewable energy at the scales needed. Coatings …

Fabrication of anisotropically arrayed nano-slots metasurfaces using reflective plasmonic lithography

J Luo, B Zeng, C Wang, P Gao, K Liu, M Pu, J Jin… - Nanoscale, 2015 - pubs.rsc.org
Nanofabrication technology with high-resolution, high-throughput and low-cost is essential
for the development of nanoplasmonic and nanophotonic devices. At present, most …

Optical performance and metallic absorption in nanoplasmonic systems

MD Arnold, MG Blaber - Optics express, 2009 - opg.optica.org
Optical metrics relating to metallic absorption in representative plasmonic systems are
surveyed, with a view to developing heuristics for optimizing performance over a range of …

Taming the electromagnetic boundaries via metasurfaces: from theory and fabrication to functional devices

X Luo, M Pu, X Ma, X Li - International Journal of Antennas and …, 2015 - Wiley Online Library
As two‐dimensional metamaterials, metasurfaces have received rapidly increasing attention
from researchers all over the world. Unlike three‐dimensional metamaterials, metasurfaces …

Deep sub-wavelength imaging lithography by a reflective plasmonic slab

C Wang, P Gao, Z Zhao, N Yao, Y Wang, L Liu, K Liu… - Optics …, 2013 - opg.optica.org
By utilizing a reflective plasmonic slab, it is demonstrated numerically and experimentally in
this paper deep sub-wavelength imaging lithography for nano characters with about 50nm …

A hollow rectangular plasmonic absorber for nano biosensing applications

S Nouri-Novin, M Sadatgol, FB Zarrabi, M Bazgir - Optik, 2019 - Elsevier
In this paper, we have introduced a hollow rectangular plasmonic absorber for Terahertz
region. The result of our study shows that the nanoparticle absorber delivers a high …

Achieving pattern uniformity in plasmonic lithography by spatial frequency selection

G Liang, X Chen, Q Zhao, LJ Guo - Nanophotonics, 2018 - degruyter.com
The effects of the surface roughness of thin films and defects on photomasks are
investigated in two representative plasmonic lithography systems: thin silver film-based …

Localizing surface plasmons with a metal-cladding superlens for projecting deep-subwavelength patterns

T Xu, L Fang, J Ma, B Zeng, Y Liu, J Cui, C Wang… - Applied Physics B, 2009 - Springer
Superlens, which is proposed to realize sub-diffraction-limited optical imaging, has been
experimentally verified (N. Fang et al., Science 308, 534 (2005), D. Melville and RJ Blaikie …