Clouds have become an attractive computing platform which offers on-demand computing
power and storage capacity. Its dynamic scalability enables users to quickly scale up and …

In today's high-technology world with flourishing e-Business and intense competition at a
global level, the search for competitive advantage has become a crucial task of corporate …

In this paper, a technology computer-aided design (TCAD) driven method for accurate
prediction of the performance spread of integrated circuits due to process variations is …

Rapid modeling and optimization of manufacturing processes, devices, and circuits are
required to support modern integrated circuit technology development and yield …

Часть вторая. Элементы и маршруты изготовления кремниевых ИС и методы их
математического моделирования. Дано представление об основных маршрутах …

As future technology generations for integrated circuits continue to" shrink", TCAD tools must
be made more central to manufacturing issues; thus, yield optimization and design for …

With increasing IC packing density IC manufacturing processes are becoming more and
more complex and tolerances of process parameters more critical for production yield and …

A new technique for Plasma Enhanced Chemical Vapor Deposition (PECVD) of silicon
nitride is presented in this paper. This technique involves specially built equipment which …

Fundamental to successful manufacturing of integrated circuits is the achievement of
sufficient control in all process steps to realize, with very high yield, fully functional circuits …

Ever increasing complexities and performance requirements of chips necessitates paradigm
shift from our traditional approaches. This translates into the need for continuous monitoring …