Characteristics of effective-medium-clad dielectric waveguides

W Gao, WSL Lee, X Yu, M Fujita… - IEEE Transactions …, 2020 - ieeexplore.ieee.org
Effective-medium-clad dielectric waveguides are purely built into a single high-resistivity
float-zone silicon wafer with their claddings defined by deep subwavelength perforations …

Design, simulation, and characterization of MEMS-based slot waveguides

J Barowski, L Schmitt, K Kother… - IEEE Transactions on …, 2023 - ieeexplore.ieee.org
This contribution presents a design approach as well as characterization results for dielectric
slot waveguides fabricated in highly resistive (HR) silicon (HR-Si) designed for operation in …

THz phase shifter based on MEMS-actuated slot waveguides

L Schmitt, J Barowski… - 2022 Fifth International …, 2022 - ieeexplore.ieee.org
We present a THz phase shifter with electrostatic actuators modifying the dimensions of a
slot waveguide. The slot waveguide is held by mechanical metamaterials whose structural …

Dielectric silicon slot-waveguides for far-infrared THz-spectroscopy

L Schmitt, K Dausien, M Burfeindt… - Terahertz …, 2024 - spiedigitallibrary.org
We present the design and characterization of dielectric slot waveguides fabricated in highly
resistive silicon for operation in the THz frequency range. We designed rib and slot …