Advances in fabrication of micro-optical components by femtosecond laser with etching technology

JX Zheng, KS Tian, JY Qi, MR Guo, XQ Liu - Optics & Laser Technology, 2023 - Elsevier
With advantages of small size, light weight, flexible design, and easy mass production, micro-
optical components of hard materials have a wide range of potential applications in artificial …

Microlenses arrays: Fabrication, materials, and applications

S Cai, Y Sun, H Chu, W Yang, H Yu… - Microscopy Research …, 2021 - Wiley Online Library
Microlenses have become an indispensable optical element in many optical systems. The
advancement of technology has led to a wider variety of microlenses fabrication methods …

Monolithic polymer microlens arrays with high numerical aperture and high packing density

H Jung, KH Jeong - ACS applied materials & interfaces, 2015 - ACS Publications
This work reports a novel method for monolithic fabrication of high numerical aperture
polymer microlens arrays (high-NA MLAs) with high packing density (PD) at wafer level. The …

[PDF][PDF] 超快激光仿生复眼加工研究进展

李江, 高筱钧, 付作立, 王文君, 梅雪松… - Chinese Journal of …, 2022 - researching.cn
摘要作为一种典型的微纳光学元件, 仿生复眼微视觉系统有机结合了光子学与微纳米技术的前沿
科学成果, 在机器人视觉导航, 无人驾驶, 微型飞行器系统等前沿领域具有广阔的应用前景 …

Single-pulse writing of a concave microlens array

XW Cao, QD Chen, L Zhang, ZN Tian, QK Li, L Wang… - Optics Letters, 2018 - opg.optica.org
This work developed a method of femtosecond laser (fs-laser) parallel processing assisted
by wet etching to fabricate 3D micro-optical components. A 2D fs-laser spot array with …

Cross-scale additive direct-writing fabrication of micro/nano lens arrays by electrohydrodynamic jet printing

P Zhou, H Yu, W Zou, Y Zhong, X Wang, Z Wang… - Optics …, 2020 - opg.optica.org
High-quality micro/nanolens arrays (M/NLAs) are becoming irreplaceable components of
various compact and miniaturized optical systems and functional devices. There is urgent …

Fabrication of microlens array with controllable high NA and tailored optical characteristics using confined ink-jetting

L Wang, Y Luo, ZZ Liu, X Feng, B Lu - Applied Surface Science, 2018 - Elsevier
This work presents an economic and controllable fabricating method of high numerical
aperture (NA) polymer microlens array (MLA) based on ink-jetting technology. The MLAs are …

Femtosecond Laser Microfabrication of Artificial Compound Eyes

F Zhang, H Xu, Q Yang, Y Lu, G Du, F Chen - Photonics, 2024 - mdpi.com
Over millions of years of evolution, arthropods have intricately developed and fine-tuned
their highly sophisticated compound eye visual systems, serving as a valuable source of …

Simple fabrication of closed-packed IR microlens arrays on silicon by femtosecond laser wet etching

X Meng, F Chen, Q Yang, H Bian, G Du, X Hou - Applied Physics A, 2015 - Springer
We demonstrate a simple route to fabricate closed-packed infrared (IR) silicon microlens
arrays (MLAs) based on femtosecond laser irradiation assisted by wet etching method. The …

[PDF][PDF] 基于飞秒激光自调制的高数值孔径微透镜阵列制备

苑欣然, 邓景扬, 徐地华, 孙相超, 于颜豪… - Acta Optica …, 2023 - researching.cn
摘要针对硬质材料高数值孔径(NA) 微透镜阵列制备难的问题, 提出一种基于像差的自调制激光
加工方法. 该方法将飞秒激光聚焦于石英衬底的下表面, 能够实现对激光焦点的纵向拉伸 …