Piezoelectric actuators are unique driving force‐generation devices, which can transfer input
electric energy into force, displacement, or movement outputs efficiently and precisely via …

The main challenge in the commercialization of the RF-MEMS switches is their reliability,
related to both the electrical and mechanical domains. The development of test standards …

This work reports on piezoelectric aluminum nitride (AlN) based dual-beam RF MEMS
switches that have been monolithically integrated with AlN contour-mode resonators. The …

We present a novel method for the fabrication of void-free copper-filled through-glass-vias
(TGVs), and their application to the wafer-level radio frequency microelectromechanical …

This paper reports on the implementation of low-voltage complementary mechanical logic
achieved by using body-biased aluminum nitride (AlN) piezoelectric microelectro …

This book contains four parts. The first one is dedicated to concepts. It starts with the
definitions and examples of what is piezo-pyro and ferroelectricity by considering the …

This paper illustrates the design, modeling, and analysis of bridge type structure based
capacitive RF MEMS switch with different beam thickness and materials. We have used …

In the current times, microelectromechanical systems and nanoelectromechanical systems
form a major interdisciplinary area of research involving science, engineering, and …

In this paper, a new type of Radio Frequency Micro-Electro-Mechanical System (RF-MEMS)
shunt capacitive switch is designed and studied. RF MEMS switch has a number of …

Commercial success of microelectromechanical systems (MEMS) switches is limited by
several issues. A high actuation voltage requires special circuitry solutions that increase size …