High aspect ratio Ge-on-Si waveguide platform for miniaturized mid-infrared applications

AWK Fong, RCF Ang, LW Lim, LYT Lee… - Integrated Optics …, 2024 - spiedigitallibrary.org
On-chip spectrometer operating in the mid-infrared (MIR) regime (λ= 2–14 μm) enables the
miniaturization of a chemical sensing platform that identifies compounds based on their …