Micro Machining of a Si3N4/SiO2/Ti/Pt Hotplate and Its IR Emissivity Properties
ER Rwenyagila - Tanzania Journal of Science, 2023 - ajol.info
This paper presents the fabrication processes for a Si 3 N 4/SiO 2/Ti/Pt membrane based
micro hotplate (MHP) using photolithography (PL) micro-machining techniques. The …
micro hotplate (MHP) using photolithography (PL) micro-machining techniques. The …