Micro FET pressure sensor manufactured using CMOS-MEMS technique

CL Dai, PH Kao, YW Tai, CC Wu - Microelectronics Journal, 2008 - Elsevier
The fabrication of a micro field effect transistor (FET) pressure sensor using the commercial
0.35 μm complementary metal oxide semiconductor (CMOS) process and a post-process …

[PDF][PDF] Switching Magnetization Magnetic Force Microscopy—An Alternative to Conventional Lift-Mode MFM

V Cambel, D Gregušová, P Eliáš, J Fedor… - Journal of Electrical …, 2011 - sciendo.com
In the paper we present an overview of the latest progress in the conventional lift-mode
magnetic force microscopy (MFM) technique, achieved by advanced MFM tips and by …

Magnetic elements for switching magnetization magnetic force microscopy tips

V Cambel, P Eliáš, D Gregušová, J Martaus… - Journal of magnetism …, 2010 - Elsevier
Using combination of micromagnetic calculations and magnetic force microscopy (MFM)
imaging we find optimal parameters for novel magnetic tips suitable for switching …

3D scanning Hall probe microscopy with 700 nm resolution

M Dede, R Akram, A Oral - Applied Physics Letters, 2016 - pubs.aip.org
In this report, we present a three dimensional (3D) imaging of magnetic field vector B→(x, y,
z) emanating from the magnetic material surfaces using a scanning Hall probe microscopy …

On-tip sub-micrometer Hall probes for magnetic microscopy prepared by AFM lithography

D Gregušová, J Martaus, J Fedor, R Kúdela, I Kostič… - Ultramicroscopy, 2009 - Elsevier
We developed a technology of sub-micrometer Hall probes for future application in scanning
hall probe microscopy (SHPM) and magnetic force microscopy (MFM). First, the Hall probes …

Development of nano hall sensors for high resolution scanning hall probe microscopy

M Dede - 2008 - search.proquest.com
Abstract Scanning Hall Probe Microscopy (SHPM) is a quantitative and non invasive method
of local magnetic field measurement for magnetic and superconducting materials with high …

GaAs/AlAs/InGaP heterostructure: a versatile material basis for cantilever designs

D Gregušová, R Kúdela, P Eliáš, J Šoltýs… - Journal of …, 2010 - iopscience.iop.org
We report on the design, fabrication and initial mechanical testing of cantilevers with tips
based on a GaAs/In 0.485 Ga 0.515 P/AlAs heterostructure grown by metal organic chemical …

Switchable Attenuation of Low Magnetic Fields for Integrated Vertical Hall Sensors Using a Ferromagnetic Layer

V Peters, P Beran, HP Hohe - IEEE transactions on magnetics, 2012 - ieeexplore.ieee.org
The typical measurement range of integrated Hall sensors lies between approximately 10 μ
T and 10 T. Above that range, nonlinear effects occur due to an increasing Hall angle. Below …

Czujnik do pomiaru drgań mechanicznych z przetwornikiem elektromagnetycznym

M Rybak, T Prohuń, J Gołębiowski - Przegląd Włókienniczy-Włókno …, 2007 - infona.pl
The construction of the rectangular silicon beam with mass and the by electromagnetic
transducer was described. In the silicon microsystem aluminium electrodes pattern on the …

[PDF][PDF] Model przetwornika elektromagnetycznego zastosowanego w krzemowym czujniku drgań mechanicznych

M Rybak, J Gołębiowski - Pomiary Automatyka Kontrola, 2007 - bibliotekanauki.pl
W zastosowanej konstrukcji przetwornika na powierzchni cienkiej belki krzemowej
umieszczono uzwojenie w postaci cewki płaskiej. Płynący przez przetwornik prąd …