Transparent heat regulating (THR) materials and coatings for energy saving window applications: Impact of materials design, micro-structural, and interface quality on …

GK Dalapati, AK Kushwaha, M Sharma… - Progress in materials …, 2018 - Elsevier
This review highlights the development of energy saving transparent heat regulating (THR)
materials and coating for energy saving window applications. Current state-of-the-art …

Atomic layer deposition of metals: Precursors and film growth

DJ Hagen, ME Pemble, M Karppinen - Applied Physics Reviews, 2019 - pubs.aip.org
The coating of complex three-dimensional structures with ultrathin metal films is of great
interest for current technical applications, particularly in microelectronics, as well as for basic …

Atomic layer deposition of thin films: from a chemistry perspective

J Li, G Chai, X Wang - International Journal of Extreme …, 2023 - iopscience.iop.org
Atomic layer deposition (ALD) has become an indispensable thin-film technology in the
contemporary microelectronics industry. The unique self-limited layer-by-layer growth …

Atomic layer deposition of gold metal

MBE Griffiths, PJ Pallister, DJ Mandia… - Chemistry of …, 2016 - ACS Publications
Nanoparticulate gold is a useful material being used in applications like gas-sensing, 1
heterogeneous catalysis, 2 and by virtue of its surface plasmon resonance, photonics. 3 …

Nucleation and growth of low resistivity copper thin films on polyimide substrates by low-temperature atomic layer deposition

Z Gao, C Zhang, J Gao, Q Wang, G Xu, H Cao… - Applied Surface …, 2023 - Elsevier
The metallization of polyimide (PI) remains a formidable challenge when using an atomic
layer deposition of copper. The present study employs Cu (hfac) 2 and Et 2 Zn to deposit the …

Low-temperature atomic layer deposition of high purity, smooth, low resistivity copper films by using amidinate precursor and hydrogen plasma

Z Guo, H Li, Q Chen, L Sang, L Yang, Z Liu… - Chemistry of …, 2015 - ACS Publications
Agglomeration is a critical issue for depositing copper (Cu) thin films, and therefore, the
deposition should be preferably performed below 100° C. This work explores an atomic …

Recent developments in molecular precursors for atomic layer deposition

AL Johnson, JD Parish - 2018 - books.rsc.org
One field of organometallic and materials chemistry that has seen great advancements over
the last 20 years is that of atomic layer deposition (ALD), and in particular the development …

On the mechanism of the atomic layer deposition of Cu films on silicon oxide surfaces: activation using atomic hydrogen and three-dimensional growth

Y Yao, B Chen, F Zaera - Chemistry of Materials, 2023 - ACS Publications
The molecular details of the atomic layer deposition (ALD) of metallic copper on silicon
oxide substrates using metallorganic precursors, iminopyrrolidinate complexes in particular …

Low-Temperature Atomic Layer Deposition of Low-Resistivity Copper Thin Films Using Cu(dmap)2 and Tertiary Butyl Hydrazine

K Väyrynen, K Mizohata, J Räisänen… - Chemistry of …, 2017 - ACS Publications
Herein, we describe a process for the low-temperature atomic layer deposition of copper
using Cu (dmap) 2 (dmap= dimethylamino-2-propoxide). The use of tertiary butyl hydrazine …

Double zone thermal CVD and plasma enhanced CVD systems for deposition of films/coatings with eminent conformal coverage

Shreya, A Yadav, R Khatri, N Jain, A Bhandari… - … : Proceedings of 6th …, 2022 - Springer
The present work is regarding the study of double zone thermal chemical vapor deposition
(CVD) and plasma enhanced chemical vapor deposition (PECVD) systems. Here, we have …