[HTML][HTML] An Assessment of Local Geometric Uncertainties in Polysilicon MEMS: A Genetic Algorithm and POD-Kriging Surrogate Modeling Approach
On the way toward MEMS miniaturization, the quantification of geometric uncertainties
stands as a primary challenge. In this paper, an approach that combines genetic algorithms …
stands as a primary challenge. In this paper, an approach that combines genetic algorithms …
Solution properties of a new dynamic model for MEMS with parallel plates in the presence of fringing field
P Di Barba, L Fattorusso, M Versaci - Mathematics, 2022 - mdpi.com
In this paper, starting from a well-known nonlinear hyperbolic integro-differential model of
the fourth order describing the dynamic behavior of an electrostatic MEMS with a parallel …
the fourth order describing the dynamic behavior of an electrostatic MEMS with a parallel …