Embodiments of the present application generally relate to methods for forming a plurality of
gratings. The methods generally include depositing a material over one or more protected …

(57) ABSTRACT A method of forming an optical grating component. The method may
include providing a substrate, the substrate comprising an underlayer and a hard mask …

Optical grating components and methods of forming are provided. In some embodiments, a
method includes providing an optical grating layer, and forming an optical grating in the …

An apparatus with a grating structure and a method for forming the same are disclosed. The
grating structure includes forming a wedge-shaped structure in a grating layer using a …

A method of forming angled structures in a substrate. The method may include the operation
of forming a mask by etching angled mask features in a mask layer, disposed on a substrate …

A method for selectively dropping out feature elements from a tensor is disclosed. The
method includes generating a mask that has a plurality of mask elements. Each mask …

(57) ABSTRACT A method for selectively dropping out feature elements from a tensor is
disclosed. The method includes generating a mask that has a plurality of mask elements …

Methods of producing grating materials with variable height fins are provided. In one
example, a method may include providing a mask layer atop a substrate, the mask layer …

Methods of producing grating materials with variable height are provided. In one example, a
method may include providing a grating material atop a substrate, and positioning a shadow …

METHODS OF PRODUCING SLANTED Embodiments of the present disclosure provide a
method GRATINGS WITH VARIABLE ETCH of forming a diffracted optical element, the …