Getting ready for EUV in HVM

G Dicker, D de Bruin, B Peterson… - … European Mask and …, 2015 - spiedigitallibrary.org
The most exciting and continuous debate in our industry is how long Moore's law will
continue, and tightly connected to this is the discussion on when EUV Lithography will be …

[HTML][HTML] EUV Improves But Not Ready Progress in light source, throughput cited

R Merritt - siliconinvestor.com
SAN JOSE, Calif.—Extreme ultraviolet lithography is making slow progress, re-kindling
hopes it could be ready for production use in the 7nm node. The semiconductor industry has …

[HTML][HTML] Samsung Details Foundry Roadmap

J Lipsky - siliconinvestor.com
Perhaps the most relevant announcement is the development of a low-cost 14nm FinFET
process, 14nm LPC. The company has already shipped more than half a million 14nm …

[HTML][HTML] Intel, Samsung, TSMC Run EUV With 80W Light Source

M Rogoway - siliconinvestor.com
SAN JOSE, Calif.—It's time to come to consensus about the next generation of extreme
ultraviolet lithography systems, even though first-generation EUV steppers have not yet …

[HTML][HTML] EUV Becomes an Answer Instead of a Question Dramatic Mood Change at SPIE Advanced Lithoby Bryon Moyer

AS To-Do List - siliconinvestor.com
The mood was dramatically different from prior years. Hope was in the air, and there was a
distinct sense that the long sought-after achievement might actually be within reach.If I tell …

[HTML][HTML] Successes and frontiers in extreme UV patterning

N Felix, M Colburn, K Petrillo, N Saulnier, Y Xu, L Meli… - siliconinvestor.com
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[HTML][HTML] Intel, Samsung and others invest another $10 million in Corvallis chip startup pushing the edges of chip technology

M Rogoway - siliconinvestor.com
Some of the biggest names in the semiconductor industry are looking to a startup in
Corvallis to help break a technological impasse that's slowing the advent of new chip …

[HTML][HTML] Moore's Law's (EXTREME) Ultraviolet Savior Is Finally Ready

J Lipsky - siliconinvestor.com
It is easy to take for granted the advancements in our mobile phones, wearable electronics,
and other gadgets. But advances in computing rely on processes that the semiconductor …