As a high-precision angular rate sensor, the Frequency-Modulated (FM) gyroscope based
on MEMS craft has attracted more and more attention in recent years, owing to its …

The MEMS gyroscope by means of oven control, or the so-called ovenized MEMS
gyroscope, isolates the die from the external environment and utilizes a closed-loop …

This article proposes a digital control structure for a doubly decoupled gyroscope working in
the Lissajous frequency-modulated (LFM) mode based on digital phase-locked loops …

Electrostatic force nonlinearity is widely present in MEMS systems, which could impact the
system sensitivity performance. The Frequency modulation (FM) method is proposed as an …

We report for the first time an implementable method to identify and suppress the driving
force misalignment angle for a MEMS gyroscope working either in amplitude modulated …

We present a comprehensive experimental study of the dynamics of electrostatic MEMS
resonators under large excitations. We identified three frequency ranges where large …

In this paper, we report a multi-ring disk resonator with elliptic spokes for compensating the
aniso-elasticity of (100) single crystal silicon. The structural coupling between each ring …

In this paper we present an innovative approach to the automatic design of MEMS
gyroscopes, based on structural size optimization. A novel design environment, called …

This paper reports a novel tuning fork type 2-axis dual mass resonator with frequency and Q-
factor tuning mechanisms. The resonator consists of two proof masses and extra small …

This work presents further advancements on miniaturized gyroscopes based on NEMS
sensing, towards navigation grade applications, discussing in particular the thermal …