An attempt is made to provide a broad and brief review (with a sufficient number of
references) of the question of intrinsic stresses in films deposited via evaporation and …

High power impulse magnetron sputtering (HiPIMS) has received extensive attention in the
field of preparing diamond-like carbon (DLC) films due to the stable discharge, the high …

Nitrogenated and hydrogenated amorphous carbon (aC: H: N) films have been deposited by
a plasma beam source using a gas mixture of C 2 H 2, Ar and N 2. The Ar/C 2 H 2 ratio is …

Laser generated amorphous carbon films have been investigated by Raman and electron
energy loss spectroscopy to obtain information on bonding type and structure of carbon …

Hydrogen-free diamond-like carbon (DLC) films have been deposited with a 100 fs (FWHM)
Ti: sapphire laser beam at intensities I in the 10 14–10 15 W/cm 2 range. The films were …

Experiments have been carried out to investigate the velocity distribution of micron-size
particles (undesirable in thin-film deposition) produced in addition to atomic and ionic …

Cr-C composite films were prepared by ion plating. The structure of thin samples was
studied by transmission electron microscopy and electron diffraction. Information on the …

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House. All rights reserved. http://www.cnki.net 文章编号: 100520299 (2000) 0420080206 类 …

Recent results of a study of the deposition process and the technological development of
laser-arc are presented. Studies of the influence of arc current on film deposition were …

Peculiarities of the pulsed laser plasma method for the deposition of thin films are
demonstrated. The interaction between the laser beam and the solid target results in the …