PMUT and CMUT devices for biomedical applications: A review
Piezoelectric Micromachined Ultrasonic Transducers (PMUT) and Capacitive
Micromachined Ultrasonic Transducers (CMUT) have seen great developments in recent …
Micromachined Ultrasonic Transducers (CMUT) have seen great developments in recent …
Bionic MEMS for touching and hearing sensations: Recent progress, challenges, and solutions
This paper reviews the recent progress on bionic microelectromechanical systems (MEMS)
used for touching and hearing sensations, focusing on the following three types of devices …
used for touching and hearing sensations, focusing on the following three types of devices …
Development of high uniformity Al1-xScxN piezoelectric film stack dry etching process on 8-inch silicon wafers
J Yan, Y Zhou, S Zhang - Vacuum, 2023 - Elsevier
This paper have investigated the basic properties of inductively coupled plasma reactive ion
etching (ICP-RIE) of scandium doped aluminum nitride (Al 1-x Sc x N) thin films on 8-inch …
etching (ICP-RIE) of scandium doped aluminum nitride (Al 1-x Sc x N) thin films on 8-inch …
[HTML][HTML] High-fidelity patterning of AlN and ScAlN thin films with wet chemical etching
We report on the anisotropic wet etching of sputtered AlN and Sc 0.2 Al 0.8 N thin films. With
tetramethyl ammonium hydroxide at 80° C, the etch rates along the c-axis were 330 and 30 …
tetramethyl ammonium hydroxide at 80° C, the etch rates along the c-axis were 330 and 30 …
Vertical and Lateral Etch Survey of Ferroelectric AlN/Al1−xScxN in Aqueous KOH Solutions
Z Tang, G Esteves, J Zheng, RH Olsson III - Micromachines, 2022 - mdpi.com
Due to their favorable electromechanical properties, such as high sound velocity, low
dielectric permittivity and high electromechanical coupling, Aluminum Nitride (AlN) and …
dielectric permittivity and high electromechanical coupling, Aluminum Nitride (AlN) and …
Development of ScAlN PMUTs for medical applications
CB Karuthedath, AT Sebastian, P Helistö… - Journal of …, 2023 - ieeexplore.ieee.org
In this paper, the design, fabrication and characterization of PMUTs for medical applications
are discussed. Scandium (20% Sc/(Sc+ Al)) doped AlN is used as the piezoelectric material …
are discussed. Scandium (20% Sc/(Sc+ Al)) doped AlN is used as the piezoelectric material …
AlYN thin films with high Y content: microstructure and performance
D Solonenko, J Strube, J Fammels… - physica status solidi …, 2023 - Wiley Online Library
Pseudobinary nitride alloys display enhanced piezoelectric properties compared to their
nonalloyed counterparts enabling their wide application in high‐performance transducers …
nonalloyed counterparts enabling their wide application in high‐performance transducers …
[HTML][HTML] Residual stress analysis of aluminum nitride piezoelectric micromachined ultrasonic transducers using Raman spectroscopy
In this study, the Raman biaxial stress coefficients K II and strain-free phonon frequencies ω
0 have been determined for the E 2 (low), E 2 (high), and A 1 (LO) phonon modes of …
0 have been determined for the E 2 (low), E 2 (high), and A 1 (LO) phonon modes of …
Enhanced high-frequency piezoelectric ultrasonic transducer based on integrated AlN honeycomb structure
X Duan, P Li, C Wu, D Cui, C Xue - Sensors and Actuators A: Physical, 2024 - Elsevier
Ultrasonic transducers are vital components for transmitting and receiving sound waves,
which are customized to specific applications based on their operating frequencies. Small …
which are customized to specific applications based on their operating frequencies. Small …
[HTML][HTML] Effect of atomic layer annealing in plasma-enhanced atomic layer deposition of aluminum nitride on silicon
H Seppänen, I Prozheev, C Kauppinen… - Journal of Vacuum …, 2023 - pubs.aip.org
The effect of adding an atomic layer annealing step to a plasma-enhanced atomic layer
deposition process of aluminum nitride was investigated with commonly available materials …
deposition process of aluminum nitride was investigated with commonly available materials …