[HTML][HTML] Advances and significances of nanoparticles in semiconductor applications–A review

N Hossain, MH Mobarak, MA Mimona, MA Islam… - Results in …, 2023 - Elsevier
This review paper gives an overview of recent developments in nanoparticle research and
semiconductor industry applications. Nanoparticles have become useful building blocks for …

Trends in photoresist materials for extreme ultraviolet lithography: A review

X Wang, P Tao, Q Wang, R Zhao, T Liu, Y Hu, Z Hu… - Materials Today, 2023 - Elsevier
With the development of microelectronics, the demand for continuously miniaturized feature
sizes has driven continuous progress in lithography technology. Extreme ultraviolet (EUV) …

Unit-cell-thick zeolitic imidazolate framework films for membrane application

Q Liu, Y Miao, LF Villalobos, S Li, HY Chi, C Chen… - Nature Materials, 2023 - nature.com
Zeolitic imidazolate frameworks (ZIFs) are a subset of metal–organic frameworks with more
than 200 characterized crystalline and amorphous networks made of divalent transition …

High sensitivity resists for EUV lithography: a review of material design strategies and performance results

T Manouras, P Argitis - Nanomaterials, 2020 - mdpi.com
The need for decreasing semiconductor device critical dimensions at feature sizes below the
20 nm resolution limit has led the semiconductor industry to adopt extreme ultra violet (EUV) …

Recent developments in photoresists for extreme-ultraviolet lithography

CK Ober, F Käfer, C Yuan - Polymer, 2023 - Elsevier
This report describes recent developments and current needs in the field of high-resolution
photopolymers and photomolecules briefly describing prior generation lithographic …

Sub-wavelength patterned pulse laser lithography for efficient fabrication of large-area metasurfaces

L Huang, K Xu, D Yuan, J Hu, X Wang, S Xu - Nature communications, 2022 - nature.com
Rigorously designed sub-micrometer structure arrays are widely used in metasurfaces for
light modulation. One of the glaring restrictions is the unavailability of easily accessible …

Modular synthesis of phthalaldehyde derivatives enabling access to photoacid generator-bound self-immolative polymer resists with next-generation …

J Deng, S Bailey, S Jiang, CK Ober - Journal of the American …, 2022 - ACS Publications
The resolution, line edge roughness, and sensitivity (RLS) trade-off has fundamentally
limited the lithographic performance of chemically amplified resists. Production of next …

Organometallic and coordinative photoresist materials for EUV lithography and related photolytic mechanisms

G Lim, K Lee, S Choi, HJ Yoon - Coordination Chemistry Reviews, 2023 - Elsevier
Sub-10 nm patterning with extreme ultraviolet (EUV) light is receiving immediate attention as
a next-generation nanolithography technique, but photoresist materials optimized to EUV …

Biosensors: electrochemical devices—general concepts and performance

O Smutok, E Katz - Biosensors, 2022 - mdpi.com
This review provides a general overview of different biosensors, mostly concentrating on
electrochemical analytical devices, while briefly explaining general approaches to various …

Sulfonium-functionalized polystyrene-based nonchemically amplified resists enabling sub-13 nm nanolithography

Z Wang, J Chen, T Yu, Y Zeng, X Guo… - … Applied Materials & …, 2022 - ACS Publications
Nonchemically amplified resists based on triphenyl sulfonium triflate-modified polystyrene
(PSTS) were prepared by a facile method of modification of polystyrene with sulfonium …