A method of micromechanical device fabrication is examined in this article. The method
consists of the development of equipment which has sizes comparable with the sizes of the …

Previous years have been characterized by the growth of 3-D micro-components production.
There is an alternative to manufacture micro-components by micro-machine tools and micro …

We suggest a new technology for the production of low-cost micromechanical devices that is
based on the application of microequipment, similar to conventional mechanical equipment …