Computational thermodynamic study on CVD of silicon oxynitride films from Si–O–N–H and Si–O–N–H–Cl systems

W Huang, J Wang, Q Xu, M Yang, K Liu, J Peng… - Ceramics …, 2024 - Elsevier
High-throughput thermodynamic analysis of chemical vapor deposition of silicon oxynitride
films from the Si–O–N–H and Si–O–N–H–Cl systems are performed based on the …

Preparation and properties of porous silicon nitride ceramics with uniform spherical pores by improved pore-forming agent method

J Zhou, J Fan, G Sun, J Zhang, X Liu, D Zhang… - Journal of Alloys and …, 2015 - Elsevier
Microsphere powder containing monodisperse polymethylmethacrylate (PMMA)
microspheres and Si 3 N 4 particles was prepared by spray-dried method. The …

In situ synthesis of Si2N2O/Si3N4 composite ceramics using polysilyloxycarbodiimide precursors

H Cheng, Y Li, E Kroke, S Herkenhoff - Journal of the European Ceramic …, 2013 - Elsevier
In situ synthesis of Si2N2O/Si3N4 composite ceramics was conducted via thermolysis of
novel polysilyloxycarbodiimide ([SiOSi (NCN) 3] n) precursors between 1000 and 1500° C in …

Catalytic nitridation preparation of high-performance Si3N4 (w)-SiC composite using Fe2O3 nano-particle catalyst: Experimental and DFT studies

J Liu, Y Gu, F Li, L Lu, H Zhang, S Zhang - Journal of the European Ceramic …, 2017 - Elsevier
The complete conversion from Si into Si 3 N 4 was achieved after 2 h nitridation at 1400° C
by using in-situ formed Fe 2 O 3 nano-particles (NPs) as a catalyst. Such a synthesis …

Fabrication of Si3N4 reticulated porous ceramics reinforced by needle-like β-Si3N4

H Yue, X Wang, J Tian - Ceramics International, 2014 - Elsevier
Si 3 N 4 reticulated porous ceramics (RPC) were prepared by twice-sintering and replication
techniques. The α-Si 3 N 4 and Si powder in raw materials were partially transformed into …

Silicon oxycarbide and silicon oxycarbonitride materials under concentrated solar radiation

MA Mazo, I Padilla, A López-Delgado, A Tamayo… - Materials, 2021 - mdpi.com
The potential application of silicon oxycarbonitride (SiOCN), silicon oxycarbide (SiOC) and
silicon oxycarbide–SiC (SiOC–SiC) for photothermal devices such as volumetric solar …

Thermoluminescent composites of sintered synthetic-topaz/in situ corundum for dosimetry by a novel reversible process

SA Sinclair, MI Pech-Canul, MC Acosta-Enríquez… - Heliyon, 2024 - cell.com
Abstract Topaz (Al 2 F 1· 44 (OH) 0· 56 SiO 4)/corundum (Al 2 O 3) composites were
prepared by a facile and novel reversible process from the sintering of synthetic topaz and …

Size dependence of optical and mechanical properties of Si 3 N 4 nanobelts controlled by flow rates

S Dong, P Hu, X Zhang, Y Cheng, D Zhang… - Journal of Materials …, 2016 - pubs.rsc.org
Single-crystalline Si3N4 nanobelts (NBs) were successfully synthesized in a size-controlled
manner using graphite, nanosilicon and nanosilica powders in N2 gas. The average width of …

Kinetics of Silicon Nitride Formation on SiO2‐Derived Rice Husk Ash Using the Chemical Vapor Infiltration Method

N Soltani, A Bahrami, MI Pech‐Canul… - … Journal of Chemical …, 2017 - Wiley Online Library
Since silicon nitride coatings on silicon dioxide are attractive for the semiconductor and
electronics industries, cognizance of their formation kinetics is crucial for optimization of …

Characterisation of amorphous/nanocrystalline multilayer Si3N4–Si3N4/Si2N2O films prepared by alternately sputtering

E Liu, J Pu, Z Zeng, Y Wang, W Zhao - Surface Engineering, 2017 - journals.sagepub.com
By using direct current (DC) and radio frequency (RF) co-sputtering deposition, multilayer
Si3N4 films composed of alternately DC layer and RF layer were prepared. Phase …