In the current times, microelectromechanical systems and nanoelectromechanical systems
form a major interdisciplinary area of research involving science, engineering, and …

We present a two-axis micromirror array with high fill-factor, using a new fabrication
procedure on the full wafer scale. The micromirror comprises a self-aligned vertical comb …

As one of the most common spatial light modulators, linear micromirror arrays (MMAs) based
on microelectromechanical system (MEMS) processes are currently utilized in many fields …

This paper describes MEMS micromirror characterization in space environments associated
with our space applications in earth observation from the International Space Station and …

In this work, the drifts of the bias and scale factor induced by the dielectric charging are
studied for micro-electro-mechanical system (MEMS) closed-loop accelerometers. At first …

In capacitive microelectromechanical system (MEMS) devices, the application of dielectric
materials causes long-term charging problems in the dielectric layers or substrates, which …

LIDAR (LIght Detection And Ranging) is an important method in measuring atmospheric
transparency that is used to correct fluorescence light yield from extensive air showers. For …

Presented is a closed-loop feedback control of an electrostatically actuated micromirror to
track a moving light source and to stabilise fast the tilting angle. The micromirror has been …

Micrometer-scale mirrors are used in many electronic devices today such as digital light
projection. One common type of mirror is a thin plate structure supported by torsional hinges …

This paper describes a self-alignment method whereby a mirror actuation voltage,
corresponding to a specific tilting angle, is unvarying in terms of misalignment during …