Silicon dioxide sacrificial layer etching has become a major surface micromachining method
to fabricate microsensors and microactuators often made of polycrystalline silicon. An …

Micro-and Nano-Electro-Mechanical Systems (MEMS and NEMS) represent existing
(MEMS) and emerging (NEMS) technologies based on microfabrication of micron to …

Due to the smoothness of the surfaces in surface micromachining, large adhesion forces
between fabricated structures and the substrate are encountered. Four major adhesion …

We have investigated the potential of self-assembled monolayer (SAM) coatings for the
purpose of adhesion reduction in microelectromechanical systems (MEMS). Two types of …

We present an analysis describing how the Casimir effect can deflect a thin microfabricated
rectangular membrane strip and possibly collapse it into a flat, parallel, fixed surface nearby …

Using surface micromachined samples, we demonstrate the accurate measurement of
cantilever beam adhesion by using test structures which are adhered over long attachment …

This paper describes a new class of anti-stiction coatings for polysilicon MEMS. This class of
molecular film is based on the free radical reaction of a primary alkene (eg 1-octadecene …

A new method for dry etching of silicon dioxide for surface micromachining is presented to
obtain very compliant polysilicon microstructures with negligible stiction problem and to …

The problem of modification of rubbing surfaces in micrometer size microdevices (micro-
electro-mechanical systems–MEMS) to control adhesion, friction and wear as well as …

Micro actuators are widely used in NEMS/MEMS for control and sensing. However, most are
designed with suspended beams anchored at fixed points, causing two main issues …