The design and fabrication techniques for microelectromechanical systems (MEMS) and
nanodevices are progressing rapidly. However, due to material and process flow …

In this paper, we have developed a process for multistep sequential batch assembly of
complex three-dimensional (3-D) ferromagnetic microstructures. The process uses the …

The field of microrobotics covers the robotic manipulation of objects with dimensions in the
millimeter to micron range as well as the design and fabrication of autonomous robotic …

Disclosed herein are a variety of microfluidic devices and solid, typically electrically
conductive devices that can be formed using such devices as molds. In certain …

This paper reports on surface micromachined hinged structure assembly using
thermokinetic forces in the molecular flow regime. Ultrasonic vibration energy is used to …

Due to the minute scale of MEMS, inertia forces are often neglected. However, we prove that
these forces can be significant even if a microstructure's mass is< 1/spl mu/g (a 250/spl …

We provide the design method of multi-step magnetic self-assembly using ferromagnetic-
hinged structures. The process uses the magnetostatic torque generated by an external …

In this paper, a microfluidic ultrasonic multi-actuator paradigm is introduced. Mixing,
pumping, and particle capture are achieved by actuating polysilicon center-anchored …

D ici quelques années, des capteurs de toutes sortes vont envahir notre environnement.
Nous en rencontrons déjà beaucoup autour de la voiture, de l ordinateur ou de la …

On présente un nouveau micro-déclencheur électrothermique capable de déclenchement
apres avoir été tourné 90. hors plan. Le déclencheur est fabriqué et caractérisé en utilisant …