Publisher Summary Cathodoluminescence (CL) is light emitted by a solid material because
of irradiation by an electron beam. When the spectral distribution of light is studied, CL …

An experimental method to determine the temperature dependence of residual stress in
three-dimensional (3D) structures was developed using polarized Raman spectroscopy …

We have applied cathodoluminescence (CL) and Raman spectroscopies to shallow trench
isolation (STI) processes in large scale integration to investigate crystalline defects and …

A procedure to obtain the semi-quantitative depth distribution of radiative recombination
centers in silicon power devices has been developed using cross-sectional …

Cross-sectional cathodoluminescence (CL) measurements were applied to the study of
electron-irradiated punch-through insulated gate bipolar transistors (IGBTs) to investigate …

This chapter describes the latest analysis examples, combing Raman, IR, and CL
spectroscopy. Strained Si techniques, such as incorporating SiGe is essential forboost …

A new in-line monitoring method to easily and quickly detect dislocations and defects
generated before and after the SiGe epitaxial process is storongly needed. We focus on the …

抄録 Cathodoluminescence (CL) is a kind of light emission as a result of electron beam
irradiation to various materials. In the measurement technique using CL, scanning electron …