A Fully Integrated, MEMS Based, Micro-Scale Printer for Cryogenic Thin Film Structures
Cryogenically produced thin film structures at the research scale facilitate many novels
experiments. This paper discusses the construction of a fully integrated, MEMS based …
experiments. This paper discusses the construction of a fully integrated, MEMS based …
The Construction of a Fully Integrated, MEMS Based, Atomic-Scale 3D Printer
We describe the construction of a fully integrated, MEMS based, 3D printer, capable of
printing atomic-scale features. In this mm-scale device, we have built a complete nanofab for …
printing atomic-scale features. In this mm-scale device, we have built a complete nanofab for …