A survey of control issues in nanopositioning

S Devasia, E Eleftheriou… - IEEE Transactions on …, 2007 - ieeexplore.ieee.org
Nanotechnology is the science of understanding matter and the control of matter at
dimensions of 100 nm or less. Encompassing nanoscale science, engineering, and …

Heated atomic force microscope cantilevers and their applications

WP King, B Bhatia, JR Felts, HJ Kim… - Annual Review of …, 2013 - dl.begellhouse.com
Atomic force microscope (AFM) cantilevers with integrated heaters enable nanometer-scale
heat flow measurements, materials characterization, nanomanufacturing, and many other …

A systematic review of reliability issues in RF-MEMS switches

MM Saleem, H Nawaz - Micro and Nanosystems, 2019 - ingentaconnect.com
The main challenge in the commercialization of the RF-MEMS switches is their reliability,
related to both the electrical and mechanical domains. The development of test standards …

Scanning probe microscopes go video rate and beyond

MJ Rost, L Crama, P Schakel, E Van Tol… - Review of Scientific …, 2005 - pubs.aip.org
In this article we introduce a, video-rate, control system that can be used with any type of
scanning probe microscope, and that allows frame rates up to 200 images∕ s⁠. These …

[图书][B] Applied scanning probe methods I

B Bhushan, H Fuchs, S Hosaka - 2014 - books.google.com
Examining the physical and technical foundation for recent progress with this technique,
Applied Scanning Probe Methods offers a timely and comprehensive overview of SPM …

Probe-based ultrahigh-density storage technology

A Pantazi, A Sebastian… - IBM Journal of …, 2008 - ieeexplore.ieee.org
Ultrahigh storage densities can be achieved by using a thermomechanical scanning-probe-
based data-storage approach to write, read back, and erase data in very thin polymer films …

Label free analysis of transcription factors using microcantilever arrays

F Huber, M Hegner, C Gerber, HJ Güntherodt… - Biosensors and …, 2006 - Elsevier
We report the measurement of protein interaction with double-stranded DNA
oligonucleotides using cantilever microarray technology. We investigated two different DNA …

A micromechanical thermal displacement sensor with nanometre resolution

MA Lantz, GK Binnig, M Despont, U Drechsler - Nanotechnology, 2005 - iopscience.iop.org
A novel micromachined silicon displacement sensor based on the conduction of heat
between two surfaces through the ambient air is described. A displacement resolution of …

A vibration resistant nanopositioner for mobile parallel-probe storage applications

MA Lantz, HE Rothuizen, U Drechsler… - Journal of …, 2007 - ieeexplore.ieee.org
We describe a planar microelectromechanical systems (MEMS)-based x/y nanopositioner
designed for parallel-probe storage applications. The nanopositioner is actuated …

Control of MEMS-based scanning-probe data-storage devices

A Pantazi, A Sebastian, G Cherubini… - … on Control Systems …, 2007 - ieeexplore.ieee.org
Micro-electro-mechanical-system (MEMS)-based scanning-probe data-storage devices are
emerging as potential ultra-high-density, low-access-time, and low-power alternative to …