Atomic force microscope (AFM) cantilevers with integrated heaters enable nanometer-scale
heat flow measurements, materials characterization, nanomanufacturing, and many other …

Examining the physical and technical foundation for recent progress with this technique,
Applied Scanning Probe Methods offers a timely and comprehensive overview of SPM …

Atomic force microscopy (AFM) is a powerful tool for studying tribology (adhesion, friction,
and lubrication) at the nanoscale and is emerging as a critical tool for nanomanufacturing …

We report a nanolithography technique that allows simultaneous direct control of the local
chemistry and topography of thin polymer films. Specifically, a heated atomic force …

Nanomanufactured products with higher complexities in function, materials, scales and their
integration demand an increasing need for advanced manufacturing tools. It is driven by …

The development of scanning force microscopes that maintain precise control of the tip
position using displacement control (DC-SFM) has allowed significant progress in …

The development of manufacturing tools and processes capable of precisely positioning and
manipulating nanoscale components and materials is still in its embryonic stage …

We report Lorentz force-induced actuation of a silicon microcantilever having an integrated
resistive heater. Oscillating current through the cantilever interacts with the magnetic field …

A common form of MEMS actuator is a thermally actuated bimaterial, which is easy to
fabricate by surface micromachining and permits out of plane actuation, which is otherwise …

Dip pen nanolithography (DPN) is a method of creating nanoscale chemical patterns on
surfaces using an atomic force microscope (AFM) probe. Until now, efforts to increase the …