Recent developments and applications of TiN-based films synthesized by magnetron sputtering

S Atta, U NarendraKumar, K Kumar, DP Yadav… - Journal of Materials …, 2023 - Springer
Magnetron sputtering is a plasma-based Physical Vapor Deposition technique for synthesis
of surface coatings. In the present survey, we have summarized and discussed in detail both …

Comparison on the structural, mechanical and tribological properties of TiAlN coatings deposited by HiPIMS and Cathodic Arc Evaporation

MR Alhafian, JB Chemin, Y Fleming… - Surface and Coatings …, 2021 - Elsevier
TiAlN single layer coatings deposited by High-Power Impulse Magnetron Sputtering
(HiPIMS) on carbide and Si-wafers substrates were performed. They were characterized in …

Overcoming the insulating materials limitation in HiPIMS: Ion-assisted deposition of DLC coatings using bipolar HiPIMS

V Tiron, EL Ursu, D Cristea, D Munteanu, G Bulai… - Applied Surface …, 2019 - Elsevier
The present study aims to demonstrate that operating the HiPIMS discharge in bipolar
regime (BP-HiPIMS) enables an energy-enhanced deposition process of high-quality …

Nano dual-phase CuNiTiNbCr high entropy alloy films produced by high-power pulsed magnetron sputtering

Y Li, C Wang, D Ma, X Zeng, M Liu, X Jiang… - Surface and Coatings …, 2021 - Elsevier
Dual-phase high entropy alloys have been proved to have the ability to overcome the
strength-ductility trade-off. However, high-entropy alloy films are difficult to obtain a dual …

Optimizing the deposition rate and ionized flux fraction by tuning the pulse length in high power impulse magnetron sputtering

M Rudolph, N Brenning, MA Raadu… - Plasma Sources …, 2020 - iopscience.iop.org
High power impulse magnetron sputtering (HiPIMS) is an ionized physical vapour
deposition technique. While HiPIMS provides a high flux of metal ions to the substrate, the …

The effect of magnetic field configuration on structural and mechanical properties of TiN coatings deposited by HiPIMS and dcMS

A Ghailane, H Larhlimi, Y Tamraoui, M Makha… - Surface and Coatings …, 2020 - Elsevier
The quality of coatings deposited by magnetron sputtering is known to depend on, among
others, the magnetic field strength (Φ) and the magnetic field configuration. Furthermore …

Enhanced properties of tungsten thin films deposited with a novel HiPIMS approach

IL Velicu, V Tiron, C Porosnicu, I Burducea… - Applied Surface …, 2017 - Elsevier
Despite the tremendous potential for industrial use of tungsten (W), very few studies have
been reported so far on controlling and tailoring the properties of W thin films obtained by …

Deposition rate enhancement in HiPIMS through the control of magnetic field and pulse configuration

V Tiron, IL Velicu, I Mihăilă, G Popa - Surface and Coatings Technology, 2018 - Elsevier
In high power impulse magnetron sputtering (HiPIMS) process, the magnetic field and
unbalance degree and pulsing configuration are key factors in controlling metal ionization …

Experimental verification of deposition rate increase, with maintained high ionized flux fraction, by shortening the HiPIMS pulse

T Shimizu, M Zanáška, RP Villoan… - Plasma Sources …, 2021 - iopscience.iop.org
High power impulse magnetron sputtering (HiPIMS) is an ionized physical vapor deposition
technique, providing a high flux of metal ions to the substrate. However, one of the …

Structural and mechanical properties of amorphous Si–C-based thin films deposited by pulsed magnetron sputtering under different sputtering powers

Q Long, L Wang, W Yu, W Huang, L Wang - Vacuum, 2021 - Elsevier
Amorphous Si–C-based (a-SiC) thin films as protective coating have been attracting more
and more attentions. But there are contradictory reports in the literature about the effect of …