Optomechanical force sensors, cantilevers, and systems thereof

EA Douglas, M Eichenfield, A Jones… - US Patent …, 2018 - Google Patents
An optomechanical force sensor includes a substrate, a cantilevered beam anchored to the
substrate, and a probe tip positioned near an end of the cantilevered beam distal to the …

Monolithic atomic force microscopy active optical probe

AA Ukhanov, GA Smolyakov, FH Chu… - US Patent 11,016,119, 2021 - Google Patents
A new monolithic Atomic Force Microscopy (AFM) active optical probe monolithically
integrates a base of the probe, a cantilever, a semiconductor laser source, an AFM tip, and a …

Tip-enhanced stimulated Raman scattering with ultra-high-aspect-ratio tips and confocal polarization Raman spectroscopy for evaluation of sidewalls in Type II …

FH Chu, GA Smolyakov, CF Wang… - Nanoimaging and …, 2018 - spiedigitallibrary.org
Actoprobe team had developed custom Tip Enhancement Raman Spectroscopy System
(TERS) with specially developed Ultra High Aspect Ratio probes for AFM and TERS …

Heterogeneous integrated circuit for short wavelengths

DN Carothers - US Patent 10,564,356, 2020 - Google Patents
(57) ABSTRACT A heterogeneous semiconductor structure, including a first integrated circuit
and a second integrated circuit, the second integrated circuit being a photonic integrated …

VCSEL-based resonant-cavity-enhanced atomic force microscopy active optical probe

AA Ukhanov, GA Smolyakov - US Patent 10,663,485, 2020 - Google Patents
A new resonant-cavity-enhanced Atomic Force Microscopy (AFM) active optical probe
integrates a semiconductor laser source and an aperture AFM/near-field scanning optical …

Integrated III-V/silicon atomic force microscopy active optical probe

AA Ukhanov, GA Smolyakov, FH Chu - US Patent 12,072,351, 2024 - Google Patents
Abstract A new integrated III-V/silicon Atomic Force Microscopy (AFM) active optical probe
integrates a III-V semiconductor laser source and a silicon cantilever AFM probe into a …

Semiconductor-laser-integrated atomic force microscopy optical probe

AA Ukhanov, GA Smolyakov, FH Chu - US Patent App. 17/697,314, 2022 - Google Patents
US20220357360A1 - Semiconductor-laser-integrated atomic force microscopy optical
probe - Google Patents US20220357360A1 - Semiconductor-laser-integrated atomic force …

Heterogeneous integrated circuit for short wavelengths

DN Carothers - US Patent App. 17/741,972, 2022 - Google Patents
A heterogeneous semiconductor structure, including a first integrated circuit and a second
integrated circuit, the second integrated circuit being a photonic integrated circuit. The …

Thermally stable, drift resistant probe for a scanning probe microscope and method of manufacture

JK Wong, D Mukhopadhyay - US Patent 11,644,480, 2023 - Google Patents
(57) ABSTRACT A probe assembly for a surface analysis instrument such as an atomic force
microscope (AFM) that accommodates potential thermal drift effects includes a substrate …

[PDF][PDF] Tip-enhanced stimulated Raman scattering with ultra-high-aspect-ratio tips and confocal polarization Raman spectroscopy for evaluation of sidewalls in Type II …

AA Ukhanov - actoprobe.com
Actoprobe team had developed custom Tip Enhancement Raman Spectroscopy System
(TERS) with specially developed Ultra High Aspect Ratio probes for AFM and TERS …